Remote plasma generator

• US 20040070346A1
• Filed: 04/01/2003
• Published: 04/15/2004
• Est. Priority Date: 10/10/2002
• Status: Active Grant

• Current Assignee: New Power Plasma Co., Ltd.
• Original Assignee: Dae-Kyu Choi
• Inventors: Choi, Dae-Kyu
• Granted Patent: US 6,815,899 B2
• Time in Patent Office: Days
• US Class Current: 315/111.21
• CPC Class Codes: H01J 37/321 the radio frequency energy being inductively coupled to the plasma
• CPC Class Codes: H01J 37/32357 Generation remote from the workpiece, e.g. down-stream

Abstract

A remote plasma generator receives an A.C. source supplied from an A.C. power, ionizes process gas supplied from a gas source, generates plasma gas, and remotely supplies the generated gas to a process chamber. The remote plasma generator includes a main body with a gas inlet that is connected to the gas source and a gas outlet that is connected to the process chamber. A core cylinder is installed within the main body and cylindrical-shaped with an opening penetrating its center. A ring-shaped core is installed on the core cylinder. A connection pipe is included for connecting the outer surface of the main body to the inner surface of the core cylinder. An inductor coil is wound on the ring-shaped core and exposed to the outside of the main body via the connection pipe so as to be electrically connected to the A.C. power.

Claims

1. A remote plasma generator receives an alternating current source supplied from an alternating current power, ionizes process gas supplied from a gas source, generates plasma gas, and remotely supplies the generated gas to a process chamber, said remote plasma generator comprising:

a main body including a gas inlet connected to the gas source and a gas outlet connected to the process chamber;

a core cylinder installed within said main body and cylindrical-shaped with an opening penetrating a center of said core cylinder;

a ring-shaped core installed on said core cylinder;

a connection pipe connecting an outer surface of said main body to an inner surface of said core cylinder; and

an inductor coil wound on said ring-shaped core and exposed to the outside of said main body via said connection pipe accommodating an electrical connection to the alternating current power.

2. The remote plasma generator as set forth in claim 1, with said main body and said core cylinder being made of a metal tube.

3. The remote plasma generator as set forth in claim 2, further comprising a ring-shaped insulator being respectively attached to upper and lower surfaces of an inner plate of said core cylinder.

4. The remote plasma generator as set forth in claim 3, with said inner plate of said core cylinder insulated by the insulators, being connected to a part of the wound coil of said inductor coil.

5. The remote plasma generator as set forth in claim 4, with said inductor coil receiving ignition power and alternating current power during an ignition section, and said inner plate of said core cylinder insulated by the insulators serving as an ignition plug.

6. The remote plasma generator as set forth in claim 5, with the alternating current power and the ignition power using one of a synchronous system and an asynchronous system.

7. The remote plasma generator as set forth in claim 1, with the ring-shaped core being at least one ring-shaped core stacked within said core cylinder.

8. The remote plasma generator as set forth in claim 1, with the alternating current power being a sine wave.

9. A remote plasma generator receives an alternating current source supplied from an alternating current power, ionizes process gas supplied from a gas source, generates plasma gas, and remotely supplies the generated gas to a process chamber, said remote plasma generator comprising:

a main body including a gas inlet connected to the gas source and a gas outlet connected to the process chamber;

a ring-shaped core connected to said main body by two parallel-aligned openings penetrating said main body;

a vertical connector formed between the two parallel-aligned openings of said main body with upper and lower surfaces insulated from said main body by insulators; and

an inductor coil wound on said ring-shaped core and including one end connected to the upper surface of said vertical connector and the other end connected to the lower surface of said vertical connector accommodating to use said vertical connector as a line extended from said ring-shaped core.

10. The remote plasma generator as set forth in claim 9, with said main body being made of a metal tube.

11. The remote plasma generator as set forth in claim 10, with said inductor coil receiving ignition power and alternating current power during an ignition section, and said vertical connector insulated by the insulator serving as an ignition plug.

12. The remote plasma generator as set forth in claim 11, with the alternating current power and the ignition power using one of a synchronous system and an asynchronous system.

13. The remote plasma generator as set forth in claim 9, with said ring-shaped core being at least one core stacked.

14. The remote plasma generator as set forth in claim 9, with the alternating current power being a sine wave.

15. A remote plasma generator, comprising:

a main body including a gas inlet connected to a gas source and a gas outlet connected to a process chamber;

a ring-shaped core being installed within said main body;

a connection pipe connecting an outer surface of said main body to an inner surface of said main body; and

an inductor coil wound on said ring-shaped core and exposed to the outside of said main body via said connection pipe accommodating an electrical connection to an alternating current power.

16. The remote plasma generator of claim 15, further comprising a core cylinder installed within said main body with an opening penetrating a center of said core cylinder, said ring-shaped core being installed within said core cylinder.

17. The remote plasma generator of claim 16, further comprised of said core cylinder being installed on an inner center of said main body.

18. The remote plasma generator of claim 15, further comprising of:

said ring-shaped core connected to said main body through two parallel-aligned openings penetrating said main body; and

a vertical connector formed between the two parallel-aligned openings of said main body with upper and lower surfaces insulated from said main body by insulators.

19. A method of making of a remote plasma generator, comprising:

forming a main body including a gas inlet connected to a gas source and a gas outlet connected to a process chamber;

installing a ring-shaped core within said main body;

forming a connection pipe connecting an outer surface of said main body to an inner surface of said main body; and

installing an inductor coil wound on said ring-shaped core and exposed to the outside of said main body via said connection pipe accommodating an electrical connection to an alternating current power.

20. The method of claim 19, further comprising of installing a core cylinder within an inner center of said main body with an opening penetrating a center of said core cylinder, said ring-shaped core being installed within said core cylinder.