×

Apparatus and method for determining the performance of micromachined or microelectromechanical devices (MEMS)

  • US 20040070400A1
  • Filed: 05/29/2003
  • Published: 04/15/2004
  • Est. Priority Date: 05/29/2002
  • Status: Active Grant
First Claim
Patent Images

1. An apparatus for determining the performance of at least one micromachined or microelectromechanical systems device (MEMS device) intended to carry a high frequency signal having an intended working frequency, the device comprising a capacitive structure with at least one movable part, the apparatus comprising:

  • means for providing a voltage signal;

    at least one voltage divider circuit comprising, in series with the means for providing the voltage signal, an impedance, an outlet and the capacitive structure; and

    means for detecting and measuring the voltage at the outlet of the voltage divider, wherein the means for providing the voltage signal is arranged for providing a combined voltage signal of an actuation voltage able to act on the moveable part of the capacitive structure with an actuation frequency and of a measurement voltage, the measurement voltage having a measurement frequency lower than the intended working frequency.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×