Apparatus and method for determining the performance of micromachined or microelectromechanical devices (MEMS)

• US 20040070400A1
• Filed: 05/29/2003
• Published: 04/15/2004
• Est. Priority Date: 05/29/2002
• Status: Active Grant

• Current Assignee: Interuniversitair Micro-Electronica Centrum VZW (IMEC International)
• Original Assignee: Interuniversitair Micro-Electronica Centrum VZW (IMEC International)
• Inventors: van Spengen, Willem Merlijn
• Granted Patent: US 6,998,851 B2
• Time in Patent Office: Days
• US Class Current: 324/457
• CPC Class Codes: G01R 31/2822 of microwave or radiofrequency circuits of attenuation, gain, e.g. using network analyzers G01R27/28
• CPC Class Codes: G01R 31/327 Testing of circuit interrupters, switches or circuit-breakers
• CPC Class Codes: H01G 5/16 using variation of distance between electrodes
• CPC Class Codes: H01G 5/40 Structural combinations of variable capacitors with other electric elements not covered by this subclass, the structure mainly consisting of a capacitor, e.g. RC combinations
• CPC Class Codes: H01H 11/0062 Testing or measuring non-electrical properties of switches, e.g. contact velocity monitoring contacts H01H1/0015; monitoring gas density H01H33/563; monitoring vacuum H01H33/668; calibrating H01H69/01; adjusting H01H71/74; testing of electrical properties G01R31/333

Abstract

An apparatus for determining the performances of at least one micromachined or microelectromechanical device (MEMS device) intended to carry a high frequency signal having an intended working frequency is disclosed. The MEMS device comprises a capacitive structure with at least one movable part, able to move with a frequency. The apparatus comprises a voltage signal source, at least one voltage divider circuit arranged between the capacitive structure and the voltage signal source, and a detection unit for detecting and measuring the voltage at the outlet of the voltage divider. The detection unit provides a combined voltage signal of an actuation voltage able to act on the moveable part of the capacitive structure with an actuation frequency and of a measurement voltage having a measurement frequency lower than the intended working frequency.

Claims

1. An apparatus for determining the performance of at least one micromachined or microelectromechanical systems device (MEMS device) intended to carry a high frequency signal having an intended working frequency, the device comprising a capacitive structure with at least one movable part, the apparatus comprising:

means for providing a voltage signal;

at least one voltage divider circuit comprising, in series with the means for providing the voltage signal, an impedance, an outlet and the capacitive structure; and

means for detecting and measuring the voltage at the outlet of the voltage divider,

wherein the means for providing the voltage signal is arranged for providing a combined voltage signal of an actuation voltage able to act on the moveable part of the capacitive structure with an actuation frequency and of a measurement voltage, the measurement voltage having a measurement frequency lower than the intended working frequency.

2. An apparatus according to claim 1, wherein the actuation frequency is in the range of 1 Hz to 200 kHz.

3. An apparatus according to claim 1, wherein the MEMS device comprises an RF MEMS switch with the intended working frequency in a frequency range of 100 MHz to 100 GHz.

4. An apparatus according to claim 3, wherein the intended working frequency is in a frequency range of 100 MHz to 10 GHz.

5. An apparatus according to claim 3, wherein the measurement frequency is substantially below the signal frequency of the signals passing through or transmitted by the RF MEMS switch during operation.

6. An apparatus according to claim 1, wherein the measurement frequency is in a frequency range of 1 MHz to 50 MHz.

7. An apparatus according to claim 6, wherein the measurement frequency is in a frequency range of 1 MHz to 10 MHz.

8. An apparatus according to claim 6, wherein the measurement frequency is in a frequency range of 10 MHz to 20 MHz.

9. An apparatus according to claim 1, wherein the movable part comprises at least two movable elements which move between two extreme positions, and wherein the extreme positions are indicative of two predetermined values.

10. An apparatus according to claim 1, wherein a series of voltage divider circuits are arranged in an array with a series of capacitive structure.

11. An apparatus according to claim 10, further comprising means for digitally selecting at least one voltage divider circuit from the array of voltage divider circuits.

12. An apparatus according to claim 11, wherein the means for digitally selecting the at least one voltage divider circuit includes means for selecting at least two of the voltage divider circuits simultaneously from the array of voltage divider circuits.

13. A method of determining the performance of at least one micromachined or microelectromechanical systems device (MEMS device), capable of carrying a high frequency signal having an intended working frequency, and comprising a capacitive structure with at least one movable part, comprising:

providing a voltage signal;

applying the voltage signal to at least one voltage divider circuit comprising, an impedance, an outlet and the capacitive structure; and

detecting and measuring the voltage at the outlet of the voltage divider;

wherein the voltage signal is a combined voltage signal of an actuation voltage able to act on the moveable part of the capacity structure with an actuation frequency and a measurement voltage, the measurement voltage having a measurement frequency lower than the intended working frequency.

14. A method according to claim 13, wherein the voltage signal is applied in series to the at least one voltage divider circuit.

15. A method according to claim 13, wherein the detecting and measuring comprises analyzing the envelope of the amplitude modulated measurement voltage at the outlet of the voltage divider.

16. A method according to claim 13, wherein the actuation voltage has an actuation frequency in the range of 1 Hz to 200 kHz.

17. A method according to claim 13, wherein the MEMS device comprises a RF MEMS switch and the intended working frequency is in a frequency range of 100 MHz to 100 GHz.

18. A method according to claim 13, wherein the intended working frequency is in a frequency range of 100 MHz to 10 GHz.

19. A method according to claim 13, wherein the measurement frequency is in a frequency range of 1 MHz to 50 MHz.

20. A method according to claim 19, wherein the measurement frequency is in a frequency range of 1 MHz to 10 MHz.

21. A method according to claim 13, wherein the movable part comprises at least two movable elements which move between two extreme positions, wherein the extreme positions are indicative of two predetermined values.

22. An apparatus for determining the performance of at least one micromachined or microelectromechanical systems device (MEMS device) intended to carry a high frequency signal having an intended working frequency, the device comprising a capacitive structure with at least one movable part, the apparatus comprising:

a voltage signal source;

at least one voltage divider circuit comprising, in series with the voltage signal source, an impedance, an outlet and the capacitive structure; and

a detection unit configured to detect and measure the voltage at the outlet of the voltage divider;

wherein the detection unit is configured to provide a combined voltage signal of an actuation voltage able to act on the moveable part of the capacitive structure with an actuation frequency and of a measurement voltage, the measurement voltage having a measurement frequency lower than the intended working frequency.

23. An apparatus according to claim 22, wherein the MEMS device comprises a RF MEMS switch.

24. An apparatus according to claim 22, wherein the actuation frequency signal comprises a block wave, square wave or single pulse wave, with a duty cycle of about 50%.

25. An apparatus according to claim 22, wherein the actuation frequency is in the range of 1 Hz to 200 kHz.

26. An apparatus according to claim 22, wherein the measurement frequency is about 100 times higher than actuation frequency.

27. An apparatus according to claim 22, wherein the measurement frequency comprises a periodic signal.

28. An apparatus according to claim 27, wherein the periodic signal comprises a (co)sinusoidal, triangular wave or sawtooth wave.

29. An apparatus according to claim 27, wherein the amplitude of the measurement voltage is in the range of 100 mv to 2V.

30. A test system for a micromachined or microelectromechanical systems (MEMS) device, comprising:

a detection unit having inputs for an actuation signal, a measurement signal, and a MEMS output signal, and having ouputs for a MEMS input signal and a test result signal; and

a test unit configured to feed the received MEMS input signal to a voltage divider circuit connectable to a MEMS device, and to feed the MEMS output signal to the detection unit.

31. The test system of claim 30, additionally comprising a plurality of signal generators which output the actuation and measurement signals to the detection unit, and a computer for controlling the detection unit.

32. The test system of claim 31, wherein the plurality of signal generators comprise a first signal generator configured to provide the actuation signal and a second signal generator configured to provide the measurement signal.

33. The test system of claim 30, wherein the detection unit selectively switches the MEMS input and MEMS output signals to an array of MEMS devices.

34. The test system of claim 30, wherein the detection unit includes a signal combiner, which inputs the actuation and measurement signals, and outputs the MEMS input signal.

35. The test system of claim 30, wherein the detection unit includes a filter configured to remove portions of the MEMS output signal.

36. The test system of claim 35, wherein the detection unit additionally comprises a processing circuit configured to input the filtered MEMS output signal and output the test result signal.

37. The test system of claim 36, wherein the processing circuit comprises an amplitude modulation detector.

38. The test system of claim 37, wherein the amplitude modulation detector comprises a series type envelope detector.

39. The test system of claim 30, wherein the detection unit comprises:

a combiner configured to combine the actuation and measurement signals;

first and second switching circuits configured to selectively switch the MEMS input and MEMS output signals to an array of MEMS devices, respectively;

a filter configured to remove portions of the MEMS output signal; and

a processing circuit configured to input the filtered MEMS output signal and output the test result signal.

40. A test system for a micromachined or microelectromechanical systems (MEMS) device configured to transmit high frequency signals, comprising:

a voltage signal source,

at least one voltage divider circuit, connected in series with the voltage signal source, and being connectable to a MEMS device; and

a detection unit configured to detect and measure the voltage output by the voltage divider;

wherein the detection unit is configured to provide a combined voltage signal of an actuation voltage capable of the actuating the MEMS and of a measurement voltage.

41. The test system of claim 40, wherein the measurement voltage has a frequency lower than the frequency of the high frequency signal.