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Micromirror systems with open support structures

  • US 20040070815A1
  • Filed: 10/11/2002
  • Published: 04/15/2004
  • Est. Priority Date: 10/11/2002
  • Status: Active Grant
First Claim
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1. A micromirror device comprising:

  • a substrate with electrical components including address circuitry, and an array of micromechanical light modulator elements, each micromechanical light modulator element comprising a mirror portion above said substrate, a plurality of hinge portions below said mirror portion and a plurality of electrode portions, wherein at least one portion of each micromechanical light modulating element is held above said substrate by an open support.

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