Mirror assembly with elevator lifter

• US 20040070858A1
• Filed: 10/09/2003
• Published: 04/15/2004
• Est. Priority Date: 03/14/2002
• Status: Active Grant

• Current Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Original Assignee: MEMX, Inc. (Lumentum Holdings Inc.)
• Inventors: Rodgers, Murray Steven
• Granted Patent: US 6,808,275 B2
• Time in Patent Office: Days
• US Class Current: 359/872
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 3/004 Angular deflection
• CPC Class Codes: B81B 7/0003 MEMS mechanisms for assembling automatically hinged components, self-assembly devices self-assembly processes B81C1/00007
• CPC Class Codes: G02B 5/08 Mirrors vehicle mirrors involving special optical features B60R1/08
• CPC Class Codes: G02B 7/182 for mirrors

Abstract

The present invention is generally directed to a method and assembly for elevating and supporting a microstructure of a MEM system generally by engaging a positioning system of the MEM system with a first elevator lifter. The MEM system generally includes a first microstructure (such as a mirror) disposed in vertically spaced relation to a substrate. The positioning system generally includes an actuator assembly movably interconnected with the substrate, an elevator pivotally interconnected with the substrate and further interconnected with the microstructure, and a tether interconnecting the actuator assembly and the elevator. The first elevator lifter is provided to engage the elevator to lift/elevate the microstructure away from the substrate generally after fabrication of the MEM system and prior to utilizing the microstructure in operation of the MEM system.

Claims

1. A method for controlling a position of a mirror relative to a substrate, comprising the steps of:

exerting an at least substantially upwardly-directed force directly on an elevator to move at least a portion of said elevator at least generally away from said substrate, wherein said mirror is interconnected with said at least a portion of said elevator; and

moving said mirror from a first position to a second position by said exerting step.

2. A method, as claimed in claim 1, wherein:

said exerting step comprises using a pre-stressed beam.

3. A method, as claimed in claim 1, wherein:

said exerting step comprises exerting a passive force on said elevator.

4. A method, as claimed in claim 1, wherein:

said exerting step comprises bending a beam that is in contact with said elevator.

5. A method, as claimed in claim 4, wherein:

said bending step comprises using only passive forces.

6. A method, as claimed in claim 4, wherein:

said bending step comprises using only energy stored in said beam.

7. A method, as claimed in claim 1, wherein:

said exerting step is executed on an underside of said elevator.

8. A method, as claimed in claim 1, wherein:

said exerting step comprises moving said elevator to a neutral position.

9. A method, as claimed in claim 8, further comprising the step of:

moving said elevator from said neutral position to change an orientation of said mirror relative to said substrate.

10. A method, as claimed in claim 1, wherein:

said mirror is disposed in at least substantially parallel relation to a lateral extent of said substrate when in at least one of said first and second positions.

11. A method, as claimed in claim 1, wherein:

said mirror is disposed at an angular orientation between 0 degrees and 10 degrees in relation to a lateral extent of said substrate when in said second position.

12. A method, as claimed in claim 1, wherein:

said moving step comprises increasing a spacing between said mirror and said substrate.

13. A method, as claimed in claim 1, wherein:

said moving step comprises changing an angular orientation of said mirror relative to said substrate.

14. A method, as claimed in claim 1, wherein:

said exerting step comprises using a lifter, wherein said method further comprises the step of maintaining said lifter in spaced relation to said elevator prior to initiating said exerting step.

15. A method, as claimed in claim 14, wherein:

said maintaining step comprises anchoring a portion of said lifter with at least one fuse, and wherein said exerting step comprises blowing each said fuse and moving said lifter at least generally away from said substrate into contact with said elevator.