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Electrically isolated pillars in active devices

  • US 20040071034A1
  • Filed: 10/07/2003
  • Published: 04/15/2004
  • Est. Priority Date: 06/27/2002
  • Status: Active Grant
First Claim
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1. A method of forming an active device, the method comprising:

  • performing a first patterning operation on a first plurality of layers, the first patterning operation defining a first feature of the active device; and

    performing a second patterning operation on at least one patterned layer of the first plurality of layers, the second patterning operation defining a second feature of the active device, wherein the first and second patterning operations are performed substantially back-to-back.

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