Method of producing a light-emitting diode
First Claim
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1. A method of producing a light emitting diode or a laser diode, the method which comprises:
- providing a growth substrate and a semiconductor body selected from the group consisting of a semiconductor layer, a semiconductor layer sequence, and a semiconductor layer structure grown on the substrate;
irradiating an interface boundary between the substrate and the semiconductor body or a region in a vicinity of the interface boundary with electromagnetic radiation;
absorbing the electromagnetic radiation at the interface boundary or in the vicinity of the interface boundary and inducing a material at the interface boundary to decompose; and
separating the substrate from the semiconductor body.
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Abstract
A method of separating two layers of material from one another in such a way that the two separated layers of material are essentially fully preserved. An interface between the two layers of material at which the layers of material are to be separated, or a region in the vicinity of the interface, is exposed to electromagnetic radiation through one of the two layers of material. The electromagnetic radiation is absorbed at the interface or in the region in the vicinity of the interface and the absorbed radiation energy induces a decomposition of material at the interface.
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17 Claims
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1. A method of producing a light emitting diode or a laser diode, the method which comprises:
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providing a growth substrate and a semiconductor body selected from the group consisting of a semiconductor layer, a semiconductor layer sequence, and a semiconductor layer structure grown on the substrate;
irradiating an interface boundary between the substrate and the semiconductor body or a region in a vicinity of the interface boundary with electromagnetic radiation;
absorbing the electromagnetic radiation at the interface boundary or in the vicinity of the interface boundary and inducing a material at the interface boundary to decompose; and
separating the substrate from the semiconductor body. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17)
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