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Polishing apparatus

  • US 20040072499A1
  • Filed: 09/16/2003
  • Published: 04/15/2004
  • Est. Priority Date: 09/17/2002
  • Status: Active Grant
First Claim
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1. A polishing apparatus for polishing a workpiece, said polishing apparatus comprising:

  • a polishing unit including;

    a polishing table having a polishing surface thereon; and

    a top ring for pressing the workpiece against said polishing surface; and

    a cleaning unit including;

    a rotatable shaft configured to be vertically movable;

    at least one holding mechanism mounted to said rotatable shaft for detachably holding the workpiece; and

    a plurality of cleaning devices disposed around said rotatable shaft for cleaning the workpiece which has been polished in said polishing unit.

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