Method and apparatus for monitoring the operation of a wafer handling robot
First Claim
1. A method of monitoring the operation of a robot used to transport wafers in a semiconductor manufacturing operation, comprising the steps of:
- (A) sensing control signals sent to said robot by a controller;
(B) comparing characteristics of the control signals sensed in step (A) with a set of reference characteristics representing correct commands to said robot; and
, (C) issuing an error signal based on the comparison performed in step (B).
1 Assignment
0 Petitions
Accused Products
Abstract
The integrity of control signals used to control a wafer handling robot is monitored by a monitor connected to various points of the robotic control system. The monitor includes a memory for storing data sets representing correct, reference characteristics of the control signals. The monitor samples control signals at various points in the control system and compares these sampled signals with the stored reference characteristics in order to determine whether a signal disparity exists. If a disparity exists, the monitor generates an error.
-
Citations
20 Claims
-
1. A method of monitoring the operation of a robot used to transport wafers in a semiconductor manufacturing operation, comprising the steps of:
-
(A) sensing control signals sent to said robot by a controller;
(B) comparing characteristics of the control signals sensed in step (A) with a set of reference characteristics representing correct commands to said robot; and
,(C) issuing an error signal based on the comparison performed in step (B). - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A method of monitoring the operation of a robot used to transport wafers in a semiconductor manufacturing operation, wherein said robot is of the type including a robot mechanism and a controller connected to the robot mechanism by an electrical connector, comprising the steps of:
-
(A) sampling control signals transmitted from said controller to said robot mechanism by intercepting said control signals during the transmission thereof, (B) comparing the control signals sampled in step (A) with a first set of reference data related to correct commands to said robot;
(C) sampling feedback position signals transmitted from said robot mechanism to said controller by intercepting said feedback signals during transmission thereof, (D) comparing the feedback signals sampled in step (C) with a second set of data related to correct feedback signals; and
(E) issuing an error signal if either the comparison performed in step (B) indicates that the signals sensed in step (A) do not properly match said first set of data, or the signals sampled in step (C) do not properly match said second set of data. - View Dependent Claims (9, 10)
-
-
11. Apparatus for monitoring the operation of a robot used to transport wafers in a semiconductor manufacturing operation, wherein said robot includes a robotic mechanism driven by a motor and having an encoder for producing a feedback position signals, a controller including a motor controller and a motor drive for controlling the operation of said mechanism, and a set of electrical connections coupling said controller with said mechanism, comprising:
-
a monitor for sampling command signals issued by said controller and feedback signals generated by said encoder, for comparing said sampled signals with a set of reference data, and for issuing a error signal based on the signal comparison; and
,a set of electrical connections between said monitor and said controller and said mechanism, said connections intercepting said command signals and said feedback signals and delivering said command signals and said feedback signals to said monitor. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
-
Specification