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Vacuum processing apparatus and operating method therefor

  • US 20040074103A1
  • Filed: 10/14/2003
  • Published: 04/22/2004
  • Est. Priority Date: 08/29/1990
  • Status: Active Grant
First Claim
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1. A vacuum processing apparatus, comprising:

  • a plurality of vacuum processing chambers for processing substrates;

    at least one cassette mount table for mounting cassettes storing at least one of substrates to be processed and processed substrates in an atmosphere;

    an atmospheric transfer device for transferring said substrates in an atmosphere, being capable of moving at least vertically and of being controlled such that said substrates to be processed can be taken out of any location in the cassettes mounted on said at least one cassette mount table; and

    control means (a) for transferring substrates to be processed from any location in one of the cassettes mounted on the at least one cassette mount table in the atmosphere to at least one of the vacuum processing chambers via said atmospheric transfer device, and (b) for transferring processed substrates in said vacuum processing chambers to respective original locations of original cassettes, in which the substrates are stored prior to processing, via said atmospheric transfer device.

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