Rotary target
First Claim
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1. A rotary target for use in physical deposition processing wherein a backing tube is used comprising:
- a rotary target segment assembleable on-site and disassembleable on-site onto and from the backing tube; and
a mechanical attachment of the rotary target segment to the backing tube.
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Accused Products
Abstract
A rotary target for use in a physical deposition process. The rotary target comprises at least one rotary target segment mechanically disposed on a backing tube.
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Citations
68 Claims
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1. A rotary target for use in physical deposition processing wherein a backing tube is used comprising:
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a rotary target segment assembleable on-site and disassembleable on-site onto and from the backing tube; and
a mechanical attachment of the rotary target segment to the backing tube. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A method for on-site mechanical assembly of a rotary target, the method comprising the steps of:
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providing at least one rotary target segment;
providing a backing tube; and
mechanically assembling the rotary target segment on the backing tube. - View Dependent Claims (35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68)
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49. The method of claim 49 wherein the step of using an outer ring and an inner ring comprises using cooperative threading between the inner ring and the outer ring.
Specification