Two-wavelength confocal interferometer for measuring multiple surfaces

• US 20040075842A1
• Filed: 10/22/2002
• Published: 04/22/2004
• Est. Priority Date: 10/22/2002
• Status: Active Grant

• Current Assignee: Corning Tropel Corp. (Corning Incorporated)
• Original Assignee: Corning Tropel Corp. (Corning Incorporated)
• Inventors: Dunn, Thomas J., Kulawiec, Andrew W., Tronolone, Mark J.
• Granted Patent: US 6,781,699 B2
• Time in Patent Office: Days
• US Class Current: 356/511
• CPC Class Codes: G01B 9/02007 Two or more frequencies or sources used for interferometric measurement using only beat G01B9/02003
• CPC Class Codes: G01B 9/02019 contacting different points on same face of object
• CPC Class Codes: G01B 9/02028 Two or more reference or object arms in one interferometer
• CPC Class Codes: G01B 9/02042 Confocal imaging
• CPC Class Codes: G01B 9/02081 simultaneous quadrature detection, e.g. by spatial phase shifting

Abstract

A scanning interferometer employs dual interferometer modules at different wavelengths to expand a dynamic range of measurement, a compound probe for measuring multiple surfaces, and a confocal optical system for distinguishing between the surfaces measured by the compound probe. Within the compound probe, miniature optics divide a test beam into two sub-test beams that are focused normal to different test surfaces. Both sub-test beams contain the different wavelengths. A separate interferometer monitors movements of the compound probe for producing absolute measures of the test surfaces.

Claims

1. A scanning interferometer for measuring first and second surfaces of a test piece in sequence comprising:

a test arm and a reference arm that convey test and reference beams of light;

a beamsplitter within the test arm that separates the test beam into first and second sub-test beams;

a focusing optic within the test arm that focuses the first and second sub-test beams to different points of focus;

a compound probe within the test arm that conveys the first and second sub-test beams to the different points of focus;

an actuator that relatively moves the probe with respect to the test piece between

a first position at which;

(a) the point of focus of the first sub-test beam is positioned on the first surface of the test piece and

(b) the point of focus of the second sub-test beam is positioned off both the first and second surfaces of the test piece, and

a second position at which;

(a) the point of focus of the second sub-test beam is positioned on the second surface of the test piece and

(b) the point of focus of the first sub-test beam is positioned off both the first and second surfaces of the test piece; and

a detection system that detects interference signals between the reference beam and the first sub-test beam when the probe is located at the first position and detects interference signals between the reference beam and the second sub-test beam when the probe is located at the second position.

2. The interferometer of claim 1 in which the focusing optic is a part of a confocal optical system that excludes from detection light that is not focused on one of the test surfaces.

3. The interferometer of claim 2 in which the confocal optical system includes an imaging optic that focuses the first and second sub-test beams conjugate to the points of focus of the focusing optic.

4. The interferometer of claim 3 in which the detection system includes a detector that receives light through a limiting aperture at the focus of the imaging optic.

5. The interferometer of claim 1 in which the compound probe includes directional optics that direct the first and second sub-test beams at nominally normal incidence to the first and second surfaces of the test piece.

6. The interferometer of claim 5 in which the directional optics of the compound probe orient the first and second sub-test beams in different directions.

7. The interferometer of claim 1 further comprising laser sources that produce two beams having different first and second fundamental wavelengths.

8. The interferometer of claim 7 in which the beamsplitter is a first of a plurality of beamsplitters, a second of the beamsplitters divides the first wavelength beam of light into a first pair of test and reference beams, and a third of the beamsplitters divides the second wavelength beam into a second pair of test and reference beams.

9. The interferometer of claim 8 further comprising a fourth of the beamsplitters that combines the different wavelength test beams from the first and second pairs of test and reference beams into a common test beam such that each of the first and second sub-test beams contains both of the fundamental wavelengths.

10. The interferometer of claim 9 further comprising first and second reference delay lines within one of the test and reference arms for nominally equating optical path lengths traversed by the first and second pairs of test and reference beams.

11. The interferometer of claim 10 in which the first and second reference delay lines have adjustable optical path lengths to equate optical path lengths between the test and reference arms.

12. The interferometer of claim 9 in which the detection system includes first and second arrays of detectors that separately detect interference between each of the first and second pairs of test and reference beams.

13. The interferometer of claim 12 in which the detectors of the first and second arrays are relatively phase shifted for simultaneously detecting a plurality of phase-shifted measurements within each of the first and second pairs of test and reference beams.

14. The interferometer of claim 13 further comprising a controller that combines information from the first and second arrays to produce aggregate interference measurements having a sensitivity equated to an effective wavelength significantly longer than either of the first and second wavelengths.

15. The interferometer of claim 1 in which the actuator is a part of a relative motion system between the probe and the test piece for measuring a plurality of points on each of the first and second surfaces of the test piece.

16. The interferometer of claim 15 in which both the test arm and the reference arm are relatively movable together with the probe with respect to the test piece.

17. The interferometer of claim 16 in which the test arm, the reference arm, and the detection system are mounted together with the probe on a multi-axis stage assembly for relative motion with respect to the test piece.

18. The interferometer of claim 17 further comprising a base that supports both the test piece and the multi-axis stage assembly for relating motions between the probe and the test piece.

19. The interferometer of claim 18 further comprising a displacement-measuring interferometer that measures movements between the multi-axis stage assembly and the base.

20. The interferometer of claim 1 in which the beamsplitter and the focusing optic are supported within the probe.

21. The interferometer of claim 1 in which the beamsplitter further separates the test beam into a third sub-test beam and the focusing system focuses the third sub-test beam to another different point of focus.

22. The interferometer of claim 21 in which the actuator relatively moves the probe with respect to the test piece between a third position at which:

(a) the point of focus of the third sub-test beam is positioned on a third test surface of the test piece and

(b) the points of focus of the first and second sub-test beams are positioned off the first, second, and third test surfaces of the test piece.

23. The interferometer of claim 22 in which the detection system detects interference signals between the reference beam and the third sub-test beam when the probe is located at the third position.

24. A method of measuring multiple surfaces of a test piece with a scanning interferometer comprising the steps of:

dividing a beam of light into test and reference beams;

further dividing the test beam into first and second sub-test beams;

focusing the first and second sub-test beams to different points of focus for separately measuring first and second surfaces of the test piece;

positioning the point of focus of the first sub-test beam on the first surface of the test piece while positioning the point of focus of the second sub-test beam off of both the first and second surfaces of the test piece;

relatively moving the point of focus of the first sub-test beam across the first surface of the test piece;

positioning the point of focus of the second sub-test beam on the second surface of the test piece while positioning the point of focus of the first sub-test beam off of both the first and second surfaces of the test piece;

relatively moving the point of focus of the second sub-test beam across the second surface of the test piece;

retroreflecting the first and second sub-test beams from their respective points of focus on the surfaces of the test piece;

directing the retroreflected first and second sub-test beams together with the reference beam proximate to a detector; and

separately detecting interference signals between the reference beam and the first and second sub-test beams according to which of the sub-test beams is positioned in focus on one of the first and second surfaces of the test piece.

25. The method of claim 24 in which the step of directing includes refocusing the retroreflected first and second sub-test beams en route to the detector.

26. The method of claim 25 in which the step of directing includes refocusing the retroreflected first and second sub-test beams together with the reference beam proximate to a detector.

27. The method of claim 25 in which the step of separately detecting includes limiting an aperture dimension of the refocused light for excluding light from the sub-test beam that is not focused on one of the first and second surfaces of the test piece.

28. The method of claim 27 in which the step of refocusing includes refocusing the first and second sub-test beams conjugate to their points of focus.

29. The method of claim 28 in which the step of separately detecting includes the further steps of locating a detector at the conjugate point of focus and arranging the detector to collect light from a limited area of a conjugate focal plane to exclude light that refocuses before or after the conjugate focal plane.

30. The method of claim 24 in which the step of separately detecting includes simultaneously detecting phase-shifted interference signals between the reference beam and either of the first and second sub-test beams that is focused on one of the test surfaces.

31. The method of claim 24 including a further step of adjusting an optical path length of one of the test and reference beams to nominally equate optical path lengths of the test and reference beams.

32. The method of claim 24 including a further step of producing two beams of coherent light having different fundamental wavelengths and the step of dividing includes dividing each of the different wavelength beams into test and reference beams.

33. The method of claim 32 including a further step of combining the different wavelength test beams in advance of the step of dividing the test beam into first and second sub-test beams so that each of the first and second sub-test beams includes the two different fundamental wavelengths.

34. The method of claim 33 in which the step of separately detecting includes separately but simultaneously detecting the interference signals between the test and reference beam portions of each of the fundamental wavelengths.

35. The method of claim 34 including a further step of combining the interference signals detected for both fundamental wavelengths to produce an interference signal having a sensitivity to surface variations equivalent to those of a wavelength longer than either of the two different fundamental wavelengths of coherent light.

36. The method of claim 24 in which the step of further dividing includes dividing the test beam into a third sub-test beam.

37. The method of claim 36 in which the step of focusing includes focusing the third sub-test beam to a different point of focus for separately measuring a third surface of the test piece.

38. The method of claim 37 in which the step of positioning includes positioning the focus of the third sub-test beam on the third surface of the test piece while positioning the points of focus of the first and second sub-test beams off of the first, second, and third surfaces of the test piece, and including an additional step of relatively moving the third sub-test beam across the third surface of the test piece.

39. The method of claim 38 in which the step of retroreflecting includes retroreflecting the third sub-test beam from its point of focus on the surface of the test piece, and the step of directing includes directing the retroreflected third sub-test beam together with the reference beam proximate to a detector.

40. The method of claim 39 in which the step of separately detecting includes separately detecting interference signals between the reference beam and the first, second, and third sub-test beams according to which of the sub-test beams is positioned in focus on one of the first, second, or third surfaces of the test piece.

41. The method of claim 24 including a further step of measuring the relative motion of the point of focus of the first sub-test beam across the first surface of the test piece with a separate interferometer to detect and compensate for errors in the relative motion.

42. The method of claim 41 including a further step of measuring the relative motion of the point of focus of the second sub-test beam across the second surface of the test piece with the separate interferometer to detect and compensate for errors in the relative motion.

43. The method of claim 24 including a step of measuring from a known point of reference the movements required for positioning the point of focus of the first sub-test beam on the first surface of the test piece with a separate interferometer for resolving modulo 2π

phase ambiguities of the interference signal between the reference beam and the first sub-test beam.

44. The method of claim 43 including a step of measuring from a known point of reference the movements required for positioning the point of focus of the second sub-test beam on the second surface of the test piece with the separate interferometer for resolving modulo 2π

phase ambiguities of the interference signal between the reference beam and the second sub-test beam.

45. A method of making absolute measurements with a confocal scanning interferometer comprising the steps of:

dividing a beam of light into test and reference beams;

focusing the test beam to a point of focus;

adjusting the point of focus with respect to a surface of a test piece;

retroreflecting the test beam from the surface of the test piece;

refocusing the retroreflected test beam through a limiting aperture near a conjugate point of focus;

combining the retroreflected test beam with the reference beam for producing an interference signal;

monitoring variations of the test beam component of the interference signal;

determining a position at which the point of focus lies on the surface of the test piece based on the monitored variations of the interference signal;

separately measuring relative movements of the point of focus with respect to a known point of reference to the position at which the point of focus lies on the surface of the test piece; and

resolving phase ambiguities of the interference signal based on the measured relative movements of the point of focus with respect to the known point of reference for making absolute measurements of the test surface.

46. The method of claim 45 in which the step of separately measuring includes arranging a separate interferometer for measuring the relative movements of the point of focus.

47. The method of claim 46 including a further step of calibrating the separate interferometer by moving the point of focus to a position that lies on a surface of a master having a known dimension.

48. The method of claim 47 in which the step of calibrating includes determining the position at which the point of focus lies on the surface of the master based on the monitored variations of the interference signal.

49. The method of claim 45 including a step of further dividing the test beam into first and second sub-test beams, and the step of focusing the test beam includes focusing the first and second sub-test beams to different points of focus for separately measuring first and second surfaces of the test piece.

50. The method of claim 49 in which the step of adjusting the point of focus includes the sub-steps of positioning the point of focus of the first sub-test beam on the first surface of the test piece for measuring the first surface and positioning the point of focus of the second sub-test beam on the second surface of the test piece for measuring the second surface.

51. The method of claim 50 in which the step of retroreflecting the test beam includes retroreflecting the first and second sub-test beams from their respective points of focus on the surfaces of the test piece.

52. The method of claim 50 including a further step of separately detecting interference signals between the reference beam and the first and second sub-test beams according to which of the sub-test beams is positioned in focus on one of the first and second surfaces of the test piece.

53. The method of claim 45 including a further step of producing two beams of coherent light having different fundamental wavelengths and the step of dividing includes dividing each of the different wavelength beams into the test and reference beams.

54. The method of claim 53 including a step of simultaneously detecting the interference signals between the test and reference beam portions of each of the fundamental wavelengths.

55. The method of claim 54 including a step of combining the interference signals detected for both fundamental wavelengths to produce an interference signal having a sensitivity to surface variations equivalent to those of a wavelength longer than either of the two different fundamental wavelengths of coherent light.

56. The method of claim 55 in which the step of resolving phase ambiguities of the interference signal includes resolving phase ambiguities of the interference signal having a sensitivity to surface variations equivalent to those of a wavelength longer than either of the two different fundamental wavelengths of coherent light.