Variable capacitance membrane actuator for wide band tuning of microstrip resonators and filters
First Claim
Patent Images
1. A device for tuning an electronic circuit, comprising:
- a moveable membrane, wherein changes in distance between the membrane and the electronic circuit produce changes in capacitance of the electronic circuit; and
a first capacitive arrangement operatively associated with the membrane, comprising a first capacitor plate and a second capacitor plate, wherein the first capacitor plate is located at a first distance from the electronic circuit and connected with the membrane, and the second capacitor plate is located at a second distance from the electronic circuit, the second distance being greater than the first distance.
1 Assignment
0 Petitions
Accused Products
Abstract
A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.
188 Citations
43 Claims
-
1. A device for tuning an electronic circuit, comprising:
-
a moveable membrane, wherein changes in distance between the membrane and the electronic circuit produce changes in capacitance of the electronic circuit; and
a first capacitive arrangement operatively associated with the membrane, comprising a first capacitor plate and a second capacitor plate, wherein the first capacitor plate is located at a first distance from the electronic circuit and connected with the membrane, and the second capacitor plate is located at a second distance from the electronic circuit, the second distance being greater than the first distance. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. An actuator for varying a capacitance of an electronic circuit, comprising:
-
a moveable membrane, wherein movement of the membrane varies the capacitance of the electronic circuit; and
a rod connected with the membrane, wherein;
the movement of the membrane is obtained by varying the distance of the rod from the electric circuit;
the membrane has a static condition and a dynamic condition; and
a distance between the membrane and the electronic circuit during the dynamic condition of the membrane can either be greater or shorter than a distance between the membrane and the electronic circuit during static condition of the membrane. - View Dependent Claims (9)
-
-
10. A membrane actuator for tuning an electronic circuit, comprising:
-
a first substrate;
a first conductive material disposed on the first substrate and containing the electronic circuit, the first substrate and the first conductive material forming a first layer;
a deformable membrane;
a second conductive material connected with the flexible membrane, the flexible membrane and the second conductive material forming a second layer, the flexible membrane and the second conductive material being located at a distance from the first substrate and the first conductive material;
a second substrate;
a third conductive material connected with the second substrate, the second substrate and third conductive material forming a third layer; and
a magnetic element attached to the membrane, wherein, upon application of a bias voltage to the magnetic element, a magnetic force is produced, causing the membrane to deform, thereby varying the distance of the second conductive material from the electronic circuit and tuning the electronic circuit. - View Dependent Claims (11, 12, 13)
-
-
14. A membrane actuator for tuning an electronic circuit, comprising:
-
a first substrate;
a first conductive material disposed on the first substrate and containing the electronic circuit, the first substrate and the first conductive material forming a first layer;
a flexible membrane;
a second conductive material contacting the flexible membrane, the flexible membrane and the second conductive material forming a second layer, the flexible membrane and second conductive material being disposed above the first substrate and first pattern;
a second substrate;
a third conductive material contacting the second substrate, the second substrate and third conductive material forming a third layer, wherein;
a parallel plate capacitor having an upper plate and a lower plate is formed between the second layer and the third layer, the second conductive material forming the upper plate of the capacitor and the third conductive material forming the lower plate of the capacitor, and when a bias voltage is applied between the upper plate and the lower plate, an electrostatic force is produced, causing the membrane to deform, thereby varying the capacitance of the electronic circuit. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
-
-
25. An actuator for tuning an electronic circuit, comprising:
-
a first substrate;
a first cavity located in the first substrate;
a first electrically conductive arrangement disposed in the first cavity, the first electrically conductive arrangement comprising the electronic circuit;
a second substrate;
a second cavity located in the second substrate;
a second electrically conductive arrangement disposed in the second cavity;
a flexible membrane located between the first substrate and the second substrate; and
a third electrically conductive arrangement contacting the flexible membrane, wherein tuning of the electronic circuit is obtained by movement of the flexible membrane. - View Dependent Claims (26, 27, 28, 29)
-
-
30. A method for fabricating a membrane, comprising the steps of:
-
providing a substrate;
depositing a first metal layer on the substrate;
patterning the first metal layer to form a first metal pad;
depositing a membrane layer on the substrate and the first metal pad;
curing the membrane layer;
depositing a second metal layer on the cured membrane layer;
depositing a photoresist layer on the second metal layer;
patterning the photoresist layer to form a photoresist pad;
patterning the second metal layer to form a second metal pad;
removing the first metal pad; and
removing the photoresist pad. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
-
-
41. A membrane fabrication method comprising the steps of:
-
providing a substrate having a first side and a second side;
depositing a first protective layer on the first side;
depositing a second protective layer on the second side;
depositing a first metal layer on the first protective layer;
patterning the first metal layer to form a first metal pad;
patterning the second protective layer to form etch windows;
forming a membrane layer on the substrate and the first metal pad;
curing the membrane layer;
depositing a second metal layer on the cured membrane layer;
forming a photoresist layer on the second metal layer;
patterning the photoresist layer to form a photoresist pad;
removing a portion of the substrate through the etch windows of the second protective layer;
patterning the second metal layer to form a second metal pad;
removing the first metal pad; and
removing the photoresist pad. - View Dependent Claims (42, 43)
-
Specification