Dynamically tunable photonic bandgap microcavity waveguides via mechanical lattice control

• US 20040076362A1
• Filed: 07/15/2003
• Published: 04/22/2004
• Est. Priority Date: 07/15/2002
• Status: Active Grant

• Current Assignee: Massachusetts Institute of Technology
• Original Assignee: Massachusetts Institute of Technology
• Inventors: Wong, Chee Wei, Barbastathis, George, Johnson, Steven G.
• Granted Patent: US 7,092,606 B2
• Time in Patent Office: Days
• US Class Current: 385/14
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: G02B 6/1225 comprising photonic band-gap structures or photonic lattices
• CPC Class Codes: G02F 1/011 in optical waveguides, not otherwise provided for in this subclass
• CPC Class Codes: G02F 1/0128 based on electro-mechanical, magneto-mechanical, elasto-optic effects

Abstract

A photonic bandgap microcavity is provided. The microcavity includes a membrane structure that can experience strain. A photonic bandgap waveguide element is formed on the membrane structure having a defect so that when the membrane structure is strained, the photonic bandgap waveguide element is tuned to a selective amount.

Claims

1. A photonic bandgap microcavity comprising:

a membrane structure that can experience strain; and

a photonic bandgap waveguide element formed on said membrane structure having a defect so that when said membrane structure is strained, said photonic bandgap waveguide element is tuned to a selective amount.

2. The photonic bandgap microcavity of claim 1, wherein said membrane structure comprises a sub-micron SiO₂ layer.

3. The photonic bandgap microcavity of claim 1, wherein said photonic bandgap waveguide element comprises a 1-dimensional photonic crystal.

4. The photonic bandgap microcavity of claim 3, wherein said photonic bandgap waveguide element comprises a plurality of periodic holes.

5. The photonic bandgap microcavity of claim 4, wherein said defect breaks the periodicity of said periodic holes.

6. The photonic bandgap microcavity of claim 1, wherein said selective amount comprises approximately 1%.

7. The photonic bandgap microcavity of claim 1 further comprising at least one actuator that is coupled to said membrane so as to produce said strain.

8. The photonic bandgap microcavity of claim 7, wherein said at least one actuator produces strain on said membrane between 0.2 and 0.3%.

9. The photonic bandgap microcavity of claim 7, wherein said at least one actuator comprises a top electrode.

10. The photonic bandgap microcavity of claim 9, wherein said at least one actuator comprises a bottom electrode.

11. The photonic bandgap microcavity of claim 7, wherein said at least one actuator comprises a PZT piezoelectric actuator.

19. The method of claim 7, wherein said at least one actuator produces strain on said membrane between 0.2 and 0.3%.

20. The method of claim 7, wherein said at least one actuator comprises a top electrode.

21. The method of claim 9, wherein said at least one actuator comprises a bottom electrode.

22. The method of claim 7, wherein said at least one actuator comprises a PZT piezoelectric actuator.

12. A method of forming a photonic bandgap microcavity comprising:

providing a membrane structure that can experience strain; and

forming a photonic bandgap waveguide element on said membrane structure having a defect so that when said membrane structure is strained, said photonic bandgap waveguide element is tuned to a selective amount.

13. The method of claim 12, wherein said membrane structure comprises a sub-micron SiO₂ layer.

14. The method of claim 12, wherein said photonic bandgap waveguide element comprises a 1-dimensional photonic crystal.

15. The method of claim 14, wherein said photonic bandgap waveguide element comprises a plurality of periodic holes.

16. The method of claim 15, wherein said defect breaks the periodicity of said periodic holes.

17. The method of claim 12, wherein said selective amount comprises approximately 1%.

18. The method of claim 12 further comprising providing at least one actuator that is coupled to said membrane so as to produce said strain.