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Particle beam device with a particle source to be operated in high vacuum and cascade-type pump arrangement for such a particle beam device

  • US 20040076529A1
  • Filed: 01/06/2003
  • Published: 04/22/2004
  • Est. Priority Date: 07/07/2000
  • Status: Active Grant
First Claim
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1. Cascade-type pump arrangement for a particle beam device with first and second turbomolecular pumps (13), (14), wherein the outlet (26) of the second turbomolecular pump (13) is forepumped by an intermediate pressure region (24) situated between the main pump port (21) and the outlet (25) of the first turbomolecular pump (14).

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