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System and method for determining a return-on-investment in a semiconductor or data storage fabrication facility

  • US 20040078310A1
  • Filed: 10/17/2002
  • Published: 04/22/2004
  • Est. Priority Date: 10/17/2002
  • Status: Abandoned Application
First Claim
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1. A system for determining a return-on-investment for a production tool change or an upgraded production tool in a semiconductor or data storage fabrication facility, comprising:

  • a moves engine configured to calculate a change in output revenue;

    an operations engine configured to calculate a change in total operations expense;

    a substrate-value engine configured to calculate a change in total substrate revenue;

    a parts engine configured to calculate a change in total parts expense;

    an investment engine configured to calculate a total investment amount; and

    a revenue summary engine configured to calculate a productivity gain by summing the change in output revenue, the change in total operations expense, the change in total substrate revenue, and the change in total parts expense, the revenue summary engine further configured to calculate the return-on-investment by dividing the productivity gain by the total investment amount.

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