System and method for determining a return-on-investment in a semiconductor or data storage fabrication facility

• US 20040078310A1
• Filed: 10/17/2002
• Published: 04/22/2004
• Est. Priority Date: 10/17/2002
• Status: Abandoned Application

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: Shaffer, Louis
• Application Number:
  US10/274,251
• Publication Number:
  US 20040078310A1
• Time in Patent Office: Days
• US Class Current: 705/35
• CPC Class Codes: G06Q 10/06 Resources, workflows, human or project management; Enterprise or organisation planning; Enterprise or organisation modelling
• CPC Class Codes: G06Q 40/00 Finance; Insurance; Tax strategies; Processing of corporate or income taxes

Abstract

A return-on-investment (ROI) modeling system and method of the present invention calculates a return-on-investment for various scenarios in a semiconductor or data storage fabrication facility (“fab”). The ROI system and method of the present invention calculates the ROI based upon having fab operational details entered. The ROI calculation may be performed for an entire fab or a particular fab processing line. The present invention compares the ROI of a current operation with a contemplated change or set of changes. A complete set of pertinent factors having a relevant or significant impact on an accurate ROI calculation is taken into consideration. Further, the present invention determines costs associated with, for example, the installation of a new tool, downtime costs, short-loop test runs, split-lot testing, design-rule shrinks, and wafer-size changes. If a fab is not currently operating at maximum capacity, an embodiment of the invention calculates an increased capacity capability.

Claims

1. A system for determining a return-on-investment for a production tool change or an upgraded production tool in a semiconductor or data storage fabrication facility, comprising:

a moves engine configured to calculate a change in output revenue;

an operations engine configured to calculate a change in total operations expense;

a substrate-value engine configured to calculate a change in total substrate revenue;

a parts engine configured to calculate a change in total parts expense;

an investment engine configured to calculate a total investment amount; and

a revenue summary engine configured to calculate a productivity gain by summing the change in output revenue, the change in total operations expense, the change in total substrate revenue, and the change in total parts expense, the revenue summary engine further configured to calculate the return-on-investment by dividing the productivity gain by the total investment amount.

2. The system of claim 1, further comprising a performance engine configured to calculate a change in productivity.

3. The system of claim 2, wherein the performance engine is configured to calculate the change in productivity based on entered performance data.

4. The system of claim 3, wherein the moves engine is configured to calculate the change in output revenue based on entered moves data, a subset of the change in productivity, a subset of values calculated by the substrate-value engine, and a subset of entered substrate performance parameter data.

5. The system of claim 1, wherein the moves engine is configured to calculate the change in output revenue based on entered moves data, a subset of entered performance data, a subset of values calculated by the substrate-value engine, and a subset of entered substrate performance parameter data.

6. The system of claim 1, wherein the operations engine is configured to calculate the change in total operations expense based on entered operations data, a subset of values calculated by the moves engine, a subset of entered moves data, and a subset of entered performance data.

7. The system of claim 1, wherein the substrate-value engine is configured to calculate the change in total substrate revenue based on entered substrate performance parameter data, a subset of entered moves data, and a subset of values calculated by the moves engine.

8. The system of claim 1, wherein the parts engine is configured to calculate the change in total parts expense based on entered parts data, a subset of entered moves data, a subset of entered operations data, a subset of entered performance data, a subset of values calculated by the moves engine, and a subset of values calculated by the operations engine.

9. The system of claim 1, wherein the investment engine is configured to calculate the total investment amount based on entered investment data, a subset of values calculated by the moves engine, a subset of entered substrate performance parameter data, and a subset of entered operations data.

10. The system of claim 1, wherein the system is implemented in hardware.

11. A system for determining a return-on-investment in a semiconductor or data storage fabrication facility, comprising:

a moves engine configured to calculate a change in output revenue;

an operations engine configured to calculate a change in total operations expense;

a substrate-value engine configured to calculate a change in total substrate revenue;

a parts engine configured to calculate a change in total parts expense;

an investment engine configured to calculate a total investment amount; and

a revenue summary engine configured to calculate a productivity gain by summing the change in output revenue, the change in total operations expense, the change in total substrate revenue, and the change in total parts expense, the revenue summary engine further configured to calculate the return-on-investment by dividing the productivity gain by the total investment amount.

12. The system of claim 11, further comprising a performance engine configured to calculate a change in productivity.

13. The system of claim 12, wherein the performance engine is configured to calculate the change in productivity based on entered performance data.

14. The system of claim 13, wherein the moves engine is configured to calculate the change in output revenue based on entered moves data, a subset of the change in productivity, a subset of values calculated by the substrate-value engine, and a subset of entered substrate performance parameter data.

15. The system of claim 12, wherein the moves engine is configured to calculate the change in output revenue based on entered moves data, a subset of entered performance data, a subset of values calculated by the substrate-value engine, and a subset of entered substrate performance parameter data.

16. The system of claim 15, wherein the moves engine configured to calculate the change in output revenue is further based on a calculated change in capacity capability.

17. The system of claim 11, wherein the operations engine is configured to calculate the change in total operations expense based on entered operations data, a subset of values calculated by the moves engine, a subset of entered moves data, and a subset of entered performance data.

18. The system of claim 11, wherein the substrate-value engine is configured to calculate the change in total substrate revenue based on entered substrate performance parameter data, a subset of entered moves data, and a subset of values calculated by the moves engine.

19. The system of claim 11, wherein the parts engine is configured to calculate the change in total parts expense based on entered parts data, a subset of entered moves data, a subset of entered operations data, a subset of entered performance data, a subset of values calculated by the moves engine, and a subset of values calculated by the operations engine.

20. The system of claim 11, wherein the investment engine is configured to calculate the total investment amount based on entered investment data, a subset of values calculated by the moves engine, a subset of entered substrate performance parameter data, and a subset of entered operations data.

21. The system of claim 11, wherein the system is implemented in hardware.

22. The system of claim 11, wherein the return-on-investment is for a split-lot test.

23. The system of claim 11, wherein the return-on-investment is for a short-loop test.

24. The system of claim 11, wherein the return-on-investment is for a process change.

25. A system for determining a return-on-investment for a production tool change or an upgraded production tool in a semiconductor or data storage fabrication facility, comprising:

a means for calculating a change in output revenue;

a means for calculating a change in total operations expense;

a means for calculating a change in total substrate revenue;

a means for calculating a change in total parts expense;

a means for entering investment data and calculating a total investment amount; and

a means for calculating a productivity gain by summing the change in output revenue, the change in total operations expense, the change in total substrate revenue, and the change in total parts expense, the means for calculating the productivity gain further calculating the return-on-investment by dividing the productivity gain by the total investment amount.

26. The system of claim 25, further comprising a means for entering current and anticipated performance data and calculating a change in productivity.

27. A computer readable medium having embodied thereon a program, the program being executable by a machine to perform method steps for determining a return-on-investment for a production tool change or an upgraded production tool in a semiconductor or data storage fabrication facility, the method comprising:

entering substrate moves data;

calculating a change in output revenue;

entering operations data;

calculating a change in total operations expense;

entering substrate performance parameter data;

calculating a change in total substrate revenue;

entering any parts data;

calculating a change in total parts expense;

entering investment data;

calculating a total investment amount;

calculating a productivity gain by summing the change in output revenue, the change in total operations expense, the change in total substrate revenue, and the change in total parts expense; and

calculating a return-on-investment by dividing the productivity gain by the total investment amount.

28. The computer readable medium of claim 27, wherein the executable program method steps further comprise:

entering performance data for existing tools in a semiconductor or data storage production line;

entering anticipated performance data for the production tool change or upgraded production tool in the semiconductor or data storage production line; and

calculating a change in productivity based on the production tool change or the upgraded production tool.

29. A computer readable medium having embodied thereon a program, the program being executable by a machine to perform method steps for determining a return-on-investment in a semiconductor or data storage fabrication facility, the method comprising:

entering substrate moves data;

calculating a change in output revenue;

entering operations data;

calculating a change in total operations expense;

entering substrate performance parameter data;

calculating a change in total substrate revenue;

entering any parts data;

calculating a change in total parts expense;

entering investment data;

calculating a total investment amount;

calculating a productivity gain by summing the change in output revenue, the change in total operations expense, the change in total substrate revenue, and the change in total parts expense; and

calculating a return-on-investment by dividing the productivity gain by the total investment amount.

30. The computer readable medium of claim 29, wherein the executable program method steps further comprise:

entering performance data for existing tools in a semiconductor or data storage production line;

entering anticipated performance data for the semiconductor or data storage production line; and

calculating a change in productivity.

31. The computer readable medium of claim 29, wherein the executable program method calculates the return-on-investment for a split-lot test.

32. The computer readable medium of claim 29, wherein the executable program method calculates the return-on-investment for a short-loop test.

33. The computer readable medium of claim 29, wherein the executable program method calculates the return-on-investment for a process change.

34. The computer readable medium of claim 29, wherein the executable program method calculates the change in output revenue based on a calculated change in capacity capability.

35. A method for determining a return-on-investment for a production tool change or an upgraded production tool in a semiconductor or data storage fabrication facility, the method comprising:

entering substrate moves data;

calculating a change in output revenue;

entering operations data;

calculating a change in total operations expense;

entering substrate performance parameter data;

calculating a change in total substrate revenue;

entering any parts data;

calculating a change in total parts expense;

entering investment data;

calculating a total investment amount;

calculating a productivity gain by summing the change in output revenue, the change in total operations expense, the change in total substrate revenue, and the change in total parts expense; and

calculating a return-on-investment by dividing the productivity gain by the total investment amount.

36. The method of claim 35, further comprising:

entering performance data for existing tools in a semiconductor or data storage production line;

entering anticipated performance data for the production tool change or upgraded production tool in the semiconductor or data storage production line; and

calculating a change in productivity values based on the production tool change or upgraded production tool.

37. The method of claim 36, wherein calculating the change in output revenue is based on a subset of the change in productivity values, entered substrate moves data, entered substrate performance parameter data, and entered performance data.

38. The method of claim 35, wherein calculating the change in total operations expense is based on entered operations data, entered substrate moves data, and entered performance data.

39. The method of claim 35, wherein calculating the change in total substrate revenue is based on entered substrate performance parameter data and entered substrate moves data.

40. The method of claim 35, wherein calculating the change in total parts expense is based on entered parts data, entered substrate moves data, entered operations data, and entered performance data.

41. The method of claim 35, wherein calculating the total investment amount is based on entered investment data, entered substrate moves data, entered substrate performance parameter data, and entered operations data.

42. A method for determining a return-on-investment in a semiconductor or data storage fabrication facility, the method comprising:

entering substrate moves data;

calculating a change in output revenue;

entering operations data;

calculating a change in total operations expense;

entering substrate performance parameter data;

calculating a change in total substrate revenue;

entering any parts data;

calculating a change in total parts expense;

entering investment data;

calculating a total investment amount;

calculating a productivity gain by summing the change in output revenue, the change in total operations expense, the change in total substrate revenue, and the change in total parts expense; and

calculating a return-on-investment by dividing the productivity gain by the total investment amount.

43. The method of claim 42, further comprising:

entering performance data for existing tools in a semiconductor or data storage production line;

entering anticipated performance data for the semiconductor or data storage production line; and

calculating a change in productivity.

44. The method of claim 43, wherein calculating the change in output revenue is based on a subset of the change in productivity, entered substrate moves data, entered substrate performance parameter data, and entered performance data.

45. The method of claim 42, wherein calculating the change in total operations expense is based on entered operations data, entered substrate moves data, and entered performance data.

46. The method of claim 42, wherein calculating the change in total substrate revenue is based on entered substrate performance parameter data and entered substrate moves data.

47. The method of claim 42, wherein calculating the change in total parts expense is based on entered parts data, entered substrate moves data, entered operations data, and entered performance data.

48. The method of claim 42, wherein calculating the total investment amount is based on entered investment data, entered substrate moves data, entered substrate performance parameter data, and entered operations data.

49. The method of claim 42, wherein the return-on-investment calculation is for a split-lot test.

50. The method of claim 42, wherein the return-on-investment calculation is for a short-loop test.

51. The method of claim 42, wherein the return-on-investment calculation is for a process change.

52. The method of claim 42, wherein calculating the change in output revenue is further based on a calculated change in capacity capability.