Semiconductor manufacturing apparatus and its diagnosis apparatus and operating system
First Claim
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1. A sample processing apparatus comprising:
- a main unit for processing a sample;
a recording means for recording information of an operation in said main unit as predetermined data, which information includes a plurality of data corresponding to outputs of a plurality of sensors installed on said main unit; and
a display unit for displaying each of said data corresponding to outputs of said sensors simultaneously.
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Abstract
A sample processing apparatus having a main unit for processing a sample, a recorder for recording information of an operation in the main unit as predetermined data, which information includes a plurality of data corresponding to outputs of a plurality of sensors installed on the main unit, and a display unit for displaying each of the data corresponding to outputs of the sensors simultaneously.
40 Citations
4 Claims
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1. A sample processing apparatus comprising:
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a main unit for processing a sample;
a recording means for recording information of an operation in said main unit as predetermined data, which information includes a plurality of data corresponding to outputs of a plurality of sensors installed on said main unit; and
a display unit for displaying each of said data corresponding to outputs of said sensors simultaneously.
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2. A sample processing apparatus comprising:
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a main unit for processing a sample;
a recording means for recording data as information of an operation in said main unit operated during a predetermined period, which information includes a plurality of data corresponding to outputs of a plurality of sensors installed on said main unit; and
a display unit for displaying each of said data corresponding to outputs of said sensors for portions of said predetermined period.
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3. An apparatus for fabricating a semiconductor device comprising:
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a plurality of treating units for processing or treating a sample;
a recording means for recording data as information of operations in said plurality of treating units operated during a predetermined period, which information includes data corresponding to a plurality of events in said operations exercised by said plurality of treating units; and
a display unit for displaying each of said data corresponding to said plurality of events for portions of said predetermined period.
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4. An apparatus for fabricating a semiconductor device comprising:
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a plurality of treating units for processing or treating a sample;
a recording means for recording data including information of a plurality of operations operated in parallel during a predetermined period, by said plurality of said treating units; and
a display unit for displaying each of said data corresponding to said plurality of operations for portions of said predetermined period simultaneously.
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Specification