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Back side incident type image pickup sensor

  • US 20040079865A1
  • Filed: 09/30/2003
  • Published: 04/29/2004
  • Est. Priority Date: 10/09/2002
  • Status: Abandoned Application
First Claim
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1. A back side incident type image pickup sensor having on the front side of a semiconductor substrate a photoelectric conversion portion and an electric circuit, and having on the back side of the semiconductor substrate an opening through which a radiation beam is incident, the incident radiation beam being detected by the photoelectric conversion portion formed on the front side of the semiconductor substrate, wherein the electric circuit is disposed at a given distance in the horizontal direction from the opening.

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