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Integrated electromechanical microstructure comprising pressure adjusting means in a sealed cavity and pressure adjustment process

  • US 20040080035A1
  • Filed: 10/16/2003
  • Published: 04/29/2004
  • Est. Priority Date: 10/24/2002
  • Status: Active Grant
First Claim
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1. Integrated electromechanical microstructure comprising a base substrate and a cavity closed by a protective cover, microstructure comprising pressure adjusting means comprising at least one element made of pyrotechnic material, combustion whereof releases gas into the cavity so as to adjust the pressure in the cavity after the protective cover has been sealed

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