Integrated electromechanical microstructure comprising pressure adjusting means in a sealed cavity and pressure adjustment process
First Claim
1. Integrated electromechanical microstructure comprising a base substrate and a cavity closed by a protective cover, microstructure comprising pressure adjusting means comprising at least one element made of pyrotechnic material, combustion whereof releases gas into the cavity so as to adjust the pressure in the cavity after the protective cover has been sealed
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Accused Products
Abstract
The integrated electromechanical microstructure comprises a base substrate and a cavity closed by a protective cover. Means for adjusting the pressure in the cavity after the protective cover has been sealed comprise at least one element made of pyrotechnic material combustion whereof releases gas into the cavity. The pressure in the cavity can thus be adjusted independently from the sealing process. Selective ignition of the elements made of pyrotechnic material can be achieved by heating electrical resistors or by laser beams coming from outside the microstructure and directed selectively towards the elements made of pyrotechnic material through a transparent zone of the protective cover.
218 Citations
9 Claims
- 1. Integrated electromechanical microstructure comprising a base substrate and a cavity closed by a protective cover, microstructure comprising pressure adjusting means comprising at least one element made of pyrotechnic material, combustion whereof releases gas into the cavity so as to adjust the pressure in the cavity after the protective cover has been sealed
Specification