Method and apparats for detecting endpoint during plasma etching of thin films

• US 20040080050A1
• Filed: 03/27/2003
• Published: 04/29/2004
• Est. Priority Date: 10/24/2002
• Status: Active Grant

• Current Assignee: Lam Research Corporation
• Original Assignee: Lam Research Corporation
• Inventors: McMillin, Brian K,, Hudson, Eric, Marks, Jeffrey
• Granted Patent: US 6,908,846 B2
• Time in Patent Office: Days
• US Class Current: 257/758
• CPC Class Codes: H01J 37/32963 End-point detection
• CPC Class Codes: H01L 21/31116 by dry-etching
• CPC Class Codes: H01L 21/31138 by dry-etching
• CPC Class Codes: H01L 21/76801 characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
• CPC Class Codes: H01L 21/76807 for dual damascene structures
• CPC Class Codes: H01L 21/76829 characterised by the formation of thin functional dielectric layers, e.g. dielectric etch-stop, barrier, capping or liner layers
• CPC Class Codes: H01L 22/26 Acting in response to an ongoing measurement without interruption of processing, e.g. endpoint detection, in-situ thickness measurement endpoint detection arrangements in CMP apparatus B24B37/013, in discharge apparatus H01J37/32

Abstract

A method for controlling a plasma etch process while etching a layer stack having a first layer disposed above an end-point generating layer is disclosed. The method includes etching through the first layer and at least partially through the end-point generating layer while monitoring an absorption rate of a light beam traversing an interior portion of the plasma processing chamber, wherein the end-point generating layer is selected from a material that produces a detectable change in the absorption rate when etched. The end-point generating layer is characterized by at least one of a first characteristic and a second characteristic. The first characteristic is an insufficient thickness to function as an etch stop layer, and the second characteristic is an insufficient selectivity to etchants employed to etch through the first layer to function as the etch stop layer. The method additionally includes generating an end-point signal upon detecting the detectable change.

Claims

1. A method for controlling a plasma etch process in a plasma processing chamber, comprising:

introducing a substrate having thereon a layer stack into said plasma processing chamber, said layer stack including a first layer disposed above an end-point generating layer;

etching through said first layer and at least partially through said end-point generating layer while monitoring an absorption rate of a light beam traversing an interior portion of said plasma processing chamber, wherein said end-point generating layer is selected from a material that produces a detectable change in said absorption rate when etched, said end-point generating layer being characterized by at least one of a first characteristic and a second characteristic, said first characteristic being an insufficient thickness to function as an etch stop layer for said etching, said second characteristic being an insufficient selectivity to etchants employed to etch through said first layer to function as said etch stop layer; and

generating an end-point signal upon detecting said detectable change.

2. The method of claim 1 wherein said first layer is formed from a low-κ

material, said endpoint generating layer is formed from an end-point generating layer material having a lower κ

value than a κ

value associated with said low-κ

material of said first layer.

3. The method of claim 1 wherein said first layer is formed from a low-κ

material, said endpoint generating layer is formed from an end-point generating layer material having a substantially similar κ

value to a κ

value associated with said low-κ

material of said first layer.

4. The method of claim 1 wherein said first layer is formed from a low-κ

material, said endpoint generating layer is formed from an end-point generating layer material having a higher κ

value than a κ

value associated with said low-κ

material of said first layer.

5. The method of claim 1 wherein said low-κ

material of said first layer has κ

value between 1.8 to 3.7, inclusive.

6. The method of claim 1 wherein an end-point generating layer material of said end-point generating layer is slightly different in stoichiometry compared to a first layer material of said first layer, said end-point generating layer material being selected to produce said detectable change when etched without substantially deviating from one of an electrical characteristic and a chemical characteristic of said first layer material.

7. The method of claim 1 wherein a chemical composition of an end-point generating layer material of said end-point generating layer is the same as a chemical composition of a first layer material of said first layer except that at least one isotope of at least one element in said chemical composition of said end-point generating layer material is enriched in said end-point generating layer, a concentration of said one isotope being sufficient to produce said detectable change when said end-point generating layer is etched.

8. The method of claim 7 wherein said one element is carbon (C) and said one isotope is ¹³C.

9. The method of claim 7 wherein said one element is hydrogen (H) and said at least one isotope is deuterium H.

10. The method of claim 7 wherein said one element is oxygen (O) and said one isotope is one of oxygen-17 (170) and oxygen-18 (¹⁸O).

11. The method of claim 7 wherein said one element is silicon (Si) and said one isotope is one of silicon-29 (²⁹Si) and silicon-30 (³⁰Si).

12. The method of claim 1 wherein a chemical composition of an end-point generating layer material of said end-point generating layer is different from a chemical composition of a first layer material of said first layer, said chemical composition of said end-point generating layer being selected to produce said detectable change when etched without substantially deviating from one of an electrical characteristic and a chemical characteristic of said first layer material.

13. The method of claim 1 wherein said detecting employs a direct absorption measurement technique.

14. The method of claim 13 wherein said detecting employs a multi-pass configuration.

15. The method of claim 13 wherein said detecting employs a single-pass configuration.

16. The method of claim 1 wherein said detecting employs frequency-modulated specstroscopy.

17. The method of claim 1 wherein said detecting employs wavelength-modulated specstroscopy.

18. The method of claim 1 wherein said monitoring employs Fourier Transform Infrared Specstroscopy.

19. The method of claim 1 wherein said detecting employs a cavity ring down technique.

20. The method of claim 1 wherein said first layer is formed from a low-K fluorosilicate glass (FSG) material.

21. The method of claim 20 wherein said end-point generating layer is formed from an endpoint generating layer material having a lower κ

value than a κ

value associated with said low-κ

FSG material of said first layer.

22. The method of claim 20 wherein said end-point generating layer is formed from an endpoint generating layer material having a substantially similar κ

value to a κ

value associated with said low-κ

FSG material of said first layer

23. The method of claim 20 wherein said end-point generating layer is formed from an endpoint generating layer material having a higher κ

value than a κ

value associated with said low-κ

FSG material of said first layer

24. The method of claim 1 wherein said first layer is formed of low-κ

organosilicate glass (OSG) material.

25. The method of claim 24 wherein said end-point generating layer is formed from an endpoint generating layer material having a lower κ

value than a κ

value associated with said low-κ

OSG material of said first layer.

26. The method of claim 24 wherein said end-point generating layer is formed from an endpoint generating layer material having a substantially similar κ

value to a κ

value associated with said low-κ

OSG material of said first layer

27. The method of claim 24 wherein said end-point generating layer is formed from an endpoint generating layer material having a higher κ

value than a κ

value associated with said low-κ

FSG material of said first layer

28. The method of claim 1 wherein said first layer is formed of a low-κ

spin-on organic (SOO) material.

29. The method of claim 28 wherein said end-point generating layer is formed from an endpoint generating layer material having a lower κ

value than a κ

value associated with said low-κ

SOO material of said first layer.

30. The method of claim 28 wherein said end-point generating layer is formed from an endpoint generating layer material having a substantially similar κ

value to a κ

value associated with said low-κ

SOO material of said first layer.

31. The method of claim 28 wherein said end-point generating layer is formed from an endpoint generating layer material having a higher κ

value than a κ

value associated with said low-κ

FSG material of said first layer

32. The method of claim 1 further comprising providing a light source for generating said light beam, said light beam being selected to have a wavelength approximating an absorption wave length of plasma species whose presence triggers said detectable change.

33. The method of claim 1 wherein said detectable change in said absorption rate is responsive to a change in a CO concentration in said interior portion of said plasma processing chamber.

34. The method of claim 1 wherein said detectable change in said absorption rate is responsive to a change in a HF concentration in said interior portion of said plasma processing chamber.

35. A substrate configured to be etched in a plasma processing chamber, comprising:

a first layer, and

an end-point generating layer disposed below said first layer, said end-point generating layer being selected from a material that produces a detectable change in an absorption rate of a light beam traversing an interior portion of said plasma processing chamber when said end-point generating layer is etched, said end-point generating layer being characterized by an insufficient thickness/selectivity combination to function as an etch stop layer for a plasma etch that also etches through said first layer.

36. The substrate of claim 35 wherein said first layer is formed from a low-K fluorosilicate glass (FSG) material.

37. The substrate of claim 35 wherein said first layer is formed of low-κ

organosilicate glass (OSG) material.

38. The substrate of claim 35 wherein said first layer is formed of a low-κ

spin-on organic (SOO) material.

39. The substrate of claim 35 wherein said first layer is formed of low-κ

material, said low-κ

material having a κ

value between 1.8 and 3.7, inclusive.

40. The substrate of claim 35 wherein an end-point generating layer material of said endpoint generating layer is slightly different in stoichiometry compared to a first layer material of said first layer, said end-point generating layer material being selected to produce said detectable change when etched without substantially deviating from one of an electrical characteristic and a chemical characteristic of said first layer material.

41. The substrate of claim 35 wherein a chemical composition of an end-point generating layer material of said end-point generating layer is the same as a chemical composition of a first layer material of said first layer except that at least one isotope of at least one element in said chemical composition of said end-point generating layer material is enriched in said end-point generating layer, a concentration of said one isotope being sufficient to produce said detectable change when said end-point generating layer is etched.

42. The substrate of claim 41 wherein said one element is carbon (C) and said one isotope is ¹³C.

43. The substrate of claim 41 wherein said one element is hydrogen (H) and said at least one isotope is deuterium ²H.

44. The substrate of claim 41 wherein said one element is oxygen (O) and said one isotope is one of oxygen-17 (170) and oxygen-18 (¹⁸O).

45. The substrate of claim 41 wherein said one element is silicon (Si) and said one isotope is one of silicon-29 (²⁹Si) and silicon-30 (³⁰Si).

46. The substrate of claim 41 wherein a chemical composition of an end-point generating layer material of said end-point generating layer is different from a chemical composition of a first layer material of said first layer, said chemical composition of said end-point generating layer being selected to produce said detectable change when etched without substantially deviating from one of an electrical characteristic and a chemical characteristic of said first layer material.

47. The substrate of claim 35 wherein said detectable change in said absorption rate is responsive to a change in a CO concentration in said interior portion of said plasma processing chamber.

48. The substrate of claim 35 wherein said detectable change in said absorption rate is responsive to a change in a HF concentration in said interior portion of said plasma processing chamber.

49. In a plasma processing chamber, a method for etching through a low-κ

layer of a layer stack, said low-κ

layer being disposed above an end-point generating layer, said method comprising;

introducing a substrate having thereon said layer stack into said plasma processing chamber;

generating a light beam that traverses an interior portion of said plasma processing chamber;

etching through said layer stack, including said low-κ

layer, while monitoring an absorption rate of said light beam by a direct absorption measurement technique, wherein said end-point generating layer is selected from a material that produces a detectable change in said absorption rate when etched, said end-point generating layer being characterized by an insufficient thickness/selectivity combination to function as an etch stop layer for said etching; and

generating an end-point signal upon detecting said detectable change.

50. The method of claim 49 wherein an end-point generating layer material of said end-point generating layer is slightly different in stoichiometry compared to a low-κ

layer material of said low-κ

layer.

51. The method of claim 50 wherein said end-point generating layer material has a lower κ

value than a κ

value associated with said low-κ

material of said low-K layer.

52. The method of claim 50 wherein said end-point generating layer material has a κ

value that substantially equals to a κ

value of said low-κ

material.

53. The method of claim 50 wherein said end-point generating layer material has a higher κ

value than a κ

value associated with said low-κ

material of said low-κ

layer.

54. The method of claim 49 wherein a chemical composition of an end-point generating layer material of said end-point generating layer is the same as a chemical composition of a low-κ

layer material of said low-κ

layer except that at least one isotope of at least one element in said chemical composition of said end-point generating layer material is enriched in said end-point generating layer, a concentration of said one isotope being sufficient to produce said detectable change when said end-point generating layer is etched.

55. The method of claim 54 wherein said one element is carbon (C) and said one isotope is ¹³C.

56. The method of claim 54 wherein said one element is hydrogen (H) and said at least one isotope is deuterium ²H.

57. The method of claim 54 wherein said one element is oxygen (0) and said one isotope is one of oxygen-17 (¹⁷O) and oxygen-18 (¹⁸O).

58. The method of claim 54 wherein said element is silicon (Si) and said at least one of isotopes of said element is one of silicon-29 (²⁹Si) and silicon-30 (³⁰Si).

59. The method of claim 49 wherein a chemical composition of an end-point generating layer material of said end-point generating layer is different from a chemical composition of a loW-κ

layer material of said low-κ

layer, said chemical composition of said end-point generating layer being selected to produce said detectable change when etched.

60. The method of claim 59 wherein said end-point generating layer material has a lower K value than a κ

value associated with said low-κ

material of said low-κ

layer.

61. The method of claim 59 wherein said end-point generating layer material has a κ

value that substantially equals to a κ

value of said low-κ

material.

62. The method of claim 59 wherein said end-point generating layer material has a higher κ

value than a κ

value associated with said low-κ

material of said low-κ

layer.

63. The method of claim 49 wherein said low-κ

layer is formed from a low-κ

fluorosilicate glass (FSG) material.

64. The method of claim 49 wherein said low-κ

layer is formed of low-κ

organosilicate glass (OSG) material.

65. The method of claim 49 wherein said low-κ

layer is formed of a low-κ

spin-on organic (SOO) material.

66. The method of claim 49 wherein said plasma processing chamber represents a capacitively-coupled plasma processing chamber.

67. The method of claim 49 wherein said plasma processing chamber represents an inductively-coupled plasma processing chamber.

68. The method of claim 49 wherein said plasma processing chamber represents an microwave plasma processing chamber.

69. The method of claim 49 wherein said low-κ

layer is formed of a material having a κ

value between 1.8 and 3.7, inclusive.

70. The method of claim 49 wherein said detectable change in said absorption rate is responsive to a change in a CO concentration in said interior portion of said plasma processing chamber.

71. The method of claim 49 wherein said detectable change in said absorption rate is responsive to a change in a HF concentration in said interior portion of said plasma processing chamber.

72. A method for controlling a plasma etch process in a plasma processing chamber, comprising:

introducing a substrate having thereon a layer stack into said plasma processing chamber, said layer stack including a first layer disposed above a second layer;

etching through said first layer while monitoring an absorption rate of a light beam traversing an interior portion of said plasma processing chamber, wherein said second layer is formed of a second layer material that is sufficiently different from a first layer material of said first layer so as to result in a detectable change in said absorption rate when said first layer is etched through; and

generating an end-point signal upon detecting said detectable change.

73. The method of claim 72 wherein said first layer is a low-κ

layer.

74. The method of claim 73 wherein said first layer material is OSG.

75. The method of claim 74 wherein said second layer material is FSG.

76. The method of claim 73 wherein said detectable change in said absorption rate is responsive to a change in a CO concentration in said interior portion of said plasma processing chamber.

77. The method of claim 73 wherein said detectable change in said absorption rate is responsive to a change in a HF concentration in said interior portion of said plasma processing chamber.

78. The method of claim 72 wherein said first layer material is a low-κ

material, said second layer material having a lower κ

value than a κ

value associated with said first layer material.

79. The method of claim 72 wherein said first layer material is a low-κ

material, said second layer material having a substantially similar κ

value to a κ

value associated with said first layer material.

80. The method of claim 72 wherein said first layer material is a low-κ

material, said second layer material having a higher κ

value than a κ

value associated with said first layer material.

81. The method of claim 72 wherein said detectable change in said absorption rate is responsive to a change in a CO concentration in said interior portion of said plasma processing chamber.

82. The method of claim 72 wherein said detectable change in said absorption rate is responsive to a change in a HF concentration in said interior portion of said plasma processing chamber.

83. The method of claim 72 wherein said detecting employs a direct absorption measurement technique.

84. The method of claim 83 wherein said detecting employs a multi-pass configuration.

85. The method of claim 83 wherein said detecting employs a single-pass configuration.

86. The method of claim 72 wherein said detecting employs frequency-modulated specstroscopy.

87. The method of claim 72 wherein said detecting employs wavelength-modulated specstroscopy.

88. The method of claim 72 wherein said monitoring employs Fourier Transform Infrared Specstroscopy.

89. The method of claim 72 wherein said detecting employs a cavity ring down technique.

90. The method of claim 72 wherein said plasma etch process is part of a dual-damascene process, said first layer being configured to accommodate a trench of said dual-damascene process, said second layer being configured to accommodate a via of said dual-damascene process.