×

Capacitive type sensor

  • US 20040080325A1
  • Filed: 07/22/2003
  • Published: 04/29/2004
  • Est. Priority Date: 07/29/2002
  • Status: Active Grant
First Claim
Patent Images

1. In a capacitive type sensor having first and second electrodes, a gas sensitive film provided between the electrodes, and an insulating substrate that supports the electrodes and the gas sensitive film thereon, the improvement comprising:

  • said first and second electrodes being fixed on a surface of the insulating substrate to face each other, and each having a linear thermal expansion coefficient that is less than that of the gas sensitive film and substantially the same as that of the insulating substrate.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×