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Filter using micro-mechanical resonator

  • US 20040080382A1
  • Filed: 01/31/2003
  • Published: 04/29/2004
  • Est. Priority Date: 02/01/2002
  • Status: Active Grant
First Claim
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1. A filter comprising:

  • (a) a line to which an electric signal fed into;

    (b) a resonator, disposed in vacuum and closely to said line, for resonating by electrostatic force generated in response to a frequency of the electric signal; and

    (c) detecting means for detecting mechanical vibrations of said resonator, wherein said detecting means converts the mechanical vibrations into a signal in another form than the electric signal for the mechanical vibrations to be detected.

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