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Continuously variable analog micro-mirror device

  • US 20040080806A1
  • Filed: 10/01/2003
  • Published: 04/29/2004
  • Est. Priority Date: 10/28/2002
  • Status: Active Grant
First Claim
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1. A micro-mirror device, comprising:

  • a substrate having a surface;

    a pair of electrodes disposed adjacent to the surface of the substrate and spaced apart from each other;

    a reflective element spaced from the surface of the substrate; and

    a dielectric liquid disposed at least between the reflective element and the pair of electrodes, wherein the reflective element is adapted to be positioned at any position within a continuous range between a first position and a second position in response to analog electrical signals applied to the pair of electrodes.

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