2-D actuator and manufacturing method thereof
First Claim
1. An actuator comprising:
- a stage having a first direction and a second direction perpendicular to the first direction and seesawing around a third direction perpendicular to the first direction and the second direction with respect to a rotation center axis placed along the first direction;
a first support portion supporting a seesaw motion of the stage;
a base facing the stage under the stage at a predetermined interval and supported by the first support portion;
a stage driving portion having a plurality of first driving comb electrodes and a plurality of first stationary comb electrodes corresponding to the first driving comb electrodes which are respectively formed on a lower surface of each of the stages and an upper surface of the base facing the stages;
a second support portion supporting the first support portion so that the first support portion seesaws with respect to a rotation center axis placed along the second direction; and
a first support portion driving portion having a second driving comb electrode provided at the first support portion and a second stationary comb electrode fixedly positioned to correspond to the second driving comb electrode to generate a seesaw motion of the first support portion.
1 Assignment
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Accused Products
Abstract
An actuator includes a stage having a first direction and a second direction perpendicular to the first direction and seesawing around a third direction perpendicular to the first direction and the second direction with respect to a rotation center axis placed along the first direction. A first support portion supports a seesaw motion of the stage. A base facing the stage under the stage at a predetermined interval is supported by the first support portion. A stage driving portion has a plurality of first driving comb electrodes and a plurality of first stationary comb electrodes corresponding to the first driving comb electrodes which are respectively formed on a lower surface of each of the stages and an upper surface of the base facing the stages. A second support portion supports the first support portion so that the first support portion seesaws with respect to a rotation center axis placed along the second direction. A first support portion driving portion has a second driving comb electrode provided at the first support portion and a second stationary comb electrode fixedly positioned to correspond to the second driving comb electrode to generate a seesaw motion of the first support portion.
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Citations
28 Claims
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1. An actuator comprising:
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a stage having a first direction and a second direction perpendicular to the first direction and seesawing around a third direction perpendicular to the first direction and the second direction with respect to a rotation center axis placed along the first direction;
a first support portion supporting a seesaw motion of the stage;
a base facing the stage under the stage at a predetermined interval and supported by the first support portion;
a stage driving portion having a plurality of first driving comb electrodes and a plurality of first stationary comb electrodes corresponding to the first driving comb electrodes which are respectively formed on a lower surface of each of the stages and an upper surface of the base facing the stages;
a second support portion supporting the first support portion so that the first support portion seesaws with respect to a rotation center axis placed along the second direction; and
a first support portion driving portion having a second driving comb electrode provided at the first support portion and a second stationary comb electrode fixedly positioned to correspond to the second driving comb electrode to generate a seesaw motion of the first support portion. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. An actuator comprising:
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a stage array in which a plurality of stages are arranged parallel to one another, the stage having a first direction and a second direction perpendicular to the first direction and seesawing around a third direction perpendicular to the first direction and the second direction with respect to a rotation center axis placed along the first direction;
a first support portion supporting the stage array to enable a seesaw motion of each stage;
a base facing the stages under the stage array at a predetermined internal and supported by a the first support portion;
a stage driving portion having a first driving comb electrode and a first stationary comb electrode corresponding to the first driving comb electrode which are respectively formed on a lower surface of the stage and an upper surface of the base facing the stage;
a second support portion supporting the first support portion so that the first support portion seesaws with respect to a rotation center axis placed along the second direction; and
a first support portion driving portion having a second driving comb electrode provided at the first support portion and a second stationary comb electrode fixedly positioned to correspond to the second driving comb electrode to generate a seesaw motion of the first support portion. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24)
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25. A method of manufacturing an actuator comprising the steps of:
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forming an upper structure comprising a stage having a first driving comb electrode formed on a lower surface of the stage in a vertical direction, a first portion movable frame encompassing the stage with a first separation area having a predetermined width, a first portion stationary frame encompassing the first portion movable frame with a second separation area having a predetermined width, a torsion bar extending from both end sides of the stage and connected to the first portion movable frame, a second torsion bar extending from the first portion movable frame in the second direction and connected to the first portion stationary frame, and a plurality of second driving comb electrodes extending from the first portion movable frame in the first direction and disposed in the second separation area;
forming a lower structure comprising a stage corresponding to the stage, a second portion movable frame supporting the base and corresponding to the first portion movable frame, a first stationary comb electrode formed on the base and corresponding to the first driving comb electrode of the stage, a second portion stationary frame corresponding to the first portion stationary frame, a plurality of second stationary comb electrodes extending from the second portion stationary frame to the second separation area in the first direction, parallel to one another, and a temporary connection portion in the second separation area temporarily connecting the second portion movable frame and the second portion stationary frame;
forming the first portion movable frame and the second portion movable frame, and the first portion stationary frame and the second portion stationary frame, contact each other and bonding the same; and
separating a movable frame by removing the temporary connection portion so that the movable frame formed by the first portion movable frame and the second portion movable frame is suspended by the second torsion bar at a stationary frame formed by the first portion stationary frame and the second portion stationary frame. - View Dependent Claims (26, 27, 28)
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Specification