Method for regenerating container for plasma treatment, member inside container for plasma treatment, method for preparing member inside container for plasma treatment, and apparatus for plasma treatment

• US 20040081746A1
• Filed: 12/15/2003
• Published: 04/29/2004
• Est. Priority Date: 12/12/2000
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: Imafuku, Kosuke
• Application Number:
  US10/450,094
• Publication Number:
  US 20040081746A1
• Time in Patent Office: Days
• US Class Current: 427/2.3
• CPC Class Codes: C23C 4/01 Selective coating, e.g. pattern coating, without pre-treatment of the material to be coated
• CPC Class Codes: C23C 4/04 characterised by the coating material
• CPC Class Codes: C23C 4/11 Oxides
• CPC Class Codes: C23C 4/12 characterised by the method of spraying

Abstract

When a sprayed coating, which is constituted of alumina, a rare earth oxide, polyimide or polybenzimidazole and covers a surface of a base material of a plasma processing container internal member, becomes degraded through use in a plasma environment, the same material as that constituting the sprayed coating is resprayed over the degraded sprayed coating. As a result, the plasma processing container with its surface having become degraded through use in the plasma environment can be restored to an as-good-as-new state.

Claims

1. A method for recycling a plasma processing container, wherein:

when a sprayed coating, which is constituted of alumina, a rare earth oxide, polyimide or polybenzimidazole and covers a surface of a base material of an internal member of said plasma processing container, becomes degraded through use in a plasma environment, a material identical to the material constituting said sprayed coating is resprayed over said sprayed coating.

2. A method for recycling a plasma processing container according to claim 1, wherein:

a dry ice blast process is executed before the material is resprayed.

3. A method for recycling a plasma processing container according to claim 1 or 2, wherein:

a dry ice blast process is executed after the material is resprayed.

8. A plasma processing apparatus that executes plasma processing by adopting a method for recycling a plasma processing container according to any of claims 1 through 4.

4. A method for recycling a plasma processing container used to execute plasma processing on a substrate placed therein, wherein:

if a component provided at a specific position inside said plasma processing container becomes partially deformed during said plasma processing, the deformed portion is first removed and then a part achieving the original shape prior to the deformation is bonded onto the area from which said deformed portion has been removed.

5. A plasma processing container internal member having a surface of a base material thereof covered with a sprayed coating constituted of alumina, a rare earth oxide, polyimide or polybenzimidazole, with said sprayed coating, which has been sprayed onto said surface, blasted with dry ice.

9. A plasma processing apparatus having a plasma processing container internal member according to claim 5.

6. A method for manufacturing a plasma processing container internal member, comprising:

a step in which a surface of a base material is covered with a sprayed coating constituted of alumina, a rare earth oxide, polyimide or polybenzimidazole; and

a step in which said sprayed coating having been sprayed onto said surface is blasted with dry ice.

7. A plasma processing container internal member having a surface of a base material thereof covered with a sprayed coating constituted of polyimide or polybenzimidazole.