Biosensor, biosensor array, and method for manufacturing a plurality of biosensors
First Claim
1. A biosensor comprising:
- a detection unit including a working electrode, a reference electrode, and a auxiliary electrode arranged at constant intervals;
a pad unit including electrode pads electrically connected to the respective working electrode, reference electrode, and auxiliary electrode of the detection unit; and
a connection unit to connect the working electrode, reference electrode, and auxiliary electrode of the detection unit with the electrode pads of the pad unit, respectively, wherein the detection unit, the pad unit, and the connection unit are arranged in a line.
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Abstract
A biosensor, a biosensor array, and an efficient method for simultaneously manufacturing a plurality of biosensors with improved reproducibility are provided. The method involves forming a sacrificial layer on a substrate. Next, a lower insulating layer is formed on the sacrificial layer, and a plurality of electrodes and electrode pads are formed on the lower insulating layer. An upper insulating layer is formed on the lower insulating layer with the plurality of electrodes and electrode pads, and a hard mask layer is formed on the upper insulating layer. After a portion of the hard mask layer and the upper insulating layer is etched to expose the plurality of electrodes and electrode pads, the remaining portion of the hard mark layer and the sacrificial layer is removed, so that the substrate is separated from the insulating layer. After an enzyme layer or a composite layer of enzyme and polymer layers, or a plated layer is formed selectively on the exposed electrodes, the top of the resultant structure is coated with an external layer. Finally, the resultant structure is divided into individual biosensors.
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Citations
10 Claims
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1. A biosensor comprising:
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a detection unit including a working electrode, a reference electrode, and a auxiliary electrode arranged at constant intervals;
a pad unit including electrode pads electrically connected to the respective working electrode, reference electrode, and auxiliary electrode of the detection unit; and
a connection unit to connect the working electrode, reference electrode, and auxiliary electrode of the detection unit with the electrode pads of the pad unit, respectively, wherein the detection unit, the pad unit, and the connection unit are arranged in a line. - View Dependent Claims (2, 3, 4)
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5. A biosensor array in which a plurality of biosensors, each of which comprises a detection unit including a plurality of electrodes, a pad unit including a plurality of electrode pads to supply power to the detection unit, and a connection unit to connect the detection unit with the pad unit, the detection unit, the pad unit, and the connection unit being arranged in a line, are radially arranged at constant intervals on a substrate such that the detection unit is close to the center of the substrate,
wherein the electrode pads of the plurality of biosensors are divided in groups and are connected to separate wires, so that the same level of voltage can be applied to each group of electrode pads.
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6. A method for manufacturing a plurality of biosensors, the method comprising;
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forming a sacrificial layer on a substrate;
forming a lower insulating layer on the sacrificial layer;
forming a plurality of electrodes and electrode pads on the lower insulating layer;
forming an upper insulating layer on the lower insulating layer with the plurality of electrodes and electrode pads;
forming a hard mask layer on the upper insulating layer;
etching a portion of the hard mask layer and the upper insulating layer to expose the plurality of electrodes and electrode pads;
removing the remaining portion of the hard mark layer and the sacrificial layer so that the substrate is separated from the insulating layer, resulting in a biosensor array;
forming an enzyme layer or a composite layer of enzyme and polymer layers or forming a plated layer selectively on the exposed electrodes;
coating the top of the resultant structure with an external layer; and
dividing the resultant structure into individual biosensors. - View Dependent Claims (7, 8, 9, 10)
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Specification