Copper interconnect by immersion/electroless plating in dual damascene process
First Claim
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1. A copper electroplating method for fabrication of copper interconnect for integrated circuits, comprising:
- providing silicon wafer as an active surface having a bottom metal layer;
depositing a diffusion layers patterned to define areas having trenches and vias;
connecting a negative terminal of a power supply to contact to the bottom metal layer of the wafer; and
and copper electroplating said silicon wafer.
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Abstract
A method of fabrication of copper interconnect by means of copper electroplating is disclosed. In the conventional method of fabricating copper interconnect for integrated circuits, critical steps such as deposition of copper seed layer and chemical mechanical polishing (CMP) are required. However in this invention, both the seed layer deposition and CMP are not required.
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Citations
20 Claims
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1. A copper electroplating method for fabrication of copper interconnect for integrated circuits, comprising:
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providing silicon wafer as an active surface having a bottom metal layer;
depositing a diffusion layers patterned to define areas having trenches and vias;
connecting a negative terminal of a power supply to contact to the bottom metal layer of the wafer; and
and copper electroplating said silicon wafer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A copper electroplating method for fabrication of copper interconnect for integrated circuits, comprising:
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providing transistor structure defining an active surface having a bottom metal layer;
depositing a diffusion layers patterned to define areas having trenches and vias and forming a source, drain, gate electrodes;
connecting a negative terminal of a power supply to contact to the bottom metal layer of the wafer; and
and copper electroplating said transistor structure. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19)
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20. A copper electroplating method for fabrication of copper interconnect for integrated circuits, comprising:
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providing transistor structure defining an active surface having a bottom metal layer;
depositing a diffusion layers patterned to define areas having trenches and vias and forming a source, drain, gate electrodes;
depositing field oxide, nitride, and oxide layers with a barrier layer of tantalum to form the trenches and vias depositing tantalum patterned to the defined areas in the trenches and vias;
connecting a negative terminal of a power supply to contact to the bottom metal layer of the wafer; and
and copper electroplating said transistor structure.
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Specification