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Methods and apparatus for generating high-density plasma

  • US 20040085023A1
  • Filed: 11/04/2002
  • Published: 05/06/2004
  • Est. Priority Date: 11/04/2002
  • Status: Active Grant
First Claim
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1. An apparatus for generating a strongly-ionized plasma, the apparatus comprising:

  • an ionization source that generates a weakly-ionized plasma from a volume of feed gas;

    a power supply that applies an electrical pulse across the weakly-ionized plasma to generate the strongly-ionized plasma; and

    a means for exchanging the strongly-ionized plasma with a second volume of feed gas while applying the electrical pulse across the second volume of feed gas to generate an additional strongly-ionized plasma.

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