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Semiconductor sensor and transmitter for use in tire condition monitoring apparatus

  • US 20040085078A1
  • Filed: 10/27/2003
  • Published: 05/06/2004
  • Est. Priority Date: 12/10/2002
  • Status: Active Grant
First Claim
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1. A semiconductor sensor comprising:

  • an intermediate plate having a first surface and a second surface;

    a first electrode arranged on the first surface;

    a second electrode arranged on the second surface;

    a first plate having a cavity for forming a diaphragm and being bonded to the first surface, wherein the first plate, the intermediate plate, and the cavity define a hermetic chamber;

    a third electrode arranged in the cavity facing towards the first electrode, wherein the third electrode and the first electrode are arranged in the hermetic chamber; and

    a second plate bonded to the second surface and having a mass, the second plate including an elastic support for elastically supporting the mass and a fourth electrode arranged on the mass facing towards the second electrode.

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