Semiconductor sensor and transmitter for use in tire condition monitoring apparatus
First Claim
Patent Images
1. A semiconductor sensor comprising:
- an intermediate plate having a first surface and a second surface;
a first electrode arranged on the first surface;
a second electrode arranged on the second surface;
a first plate having a cavity for forming a diaphragm and being bonded to the first surface, wherein the first plate, the intermediate plate, and the cavity define a hermetic chamber;
a third electrode arranged in the cavity facing towards the first electrode, wherein the third electrode and the first electrode are arranged in the hermetic chamber; and
a second plate bonded to the second surface and having a mass, the second plate including an elastic support for elastically supporting the mass and a fourth electrode arranged on the mass facing towards the second electrode.
1 Assignment
0 Petitions
Accused Products
Abstract
A compact and light semiconductor sensor for detecting pressure and acceleration. A pressure sensor is formed on a first surface of an intermediate plate. An acceleration sensor is formed on a second surface of the intermediate plate. A first plate having a diaphragm is bonded to the intermediate plate to define a hermetic chamber of the pressure sensor. A second plate is bonded to the second surface of the intermediate plate. A spring support supports the mass in a manner relatively movable with respect to the second plate.
-
Citations
18 Claims
-
1. A semiconductor sensor comprising:
-
an intermediate plate having a first surface and a second surface;
a first electrode arranged on the first surface;
a second electrode arranged on the second surface;
a first plate having a cavity for forming a diaphragm and being bonded to the first surface, wherein the first plate, the intermediate plate, and the cavity define a hermetic chamber;
a third electrode arranged in the cavity facing towards the first electrode, wherein the third electrode and the first electrode are arranged in the hermetic chamber; and
a second plate bonded to the second surface and having a mass, the second plate including an elastic support for elastically supporting the mass and a fourth electrode arranged on the mass facing towards the second electrode. - View Dependent Claims (2, 3, 4, 5, 6, 7)
-
-
8. A transmitter for use in an apparatus for monitoring a condition of a tire on a vehicle, the transmitter comprising:
-
a semiconductor sensor for detecting acceleration and air pressure of the tire, the semiconductor sensor including;
an intermediate plate having a first surface and a second surface;
a first electrode arranged on the first surface;
a second electrode arranged on the second surface;
a first plate having a cavity for forming a diaphragm and being bonded to the first surface, wherein the first plate, the intermediate plate, and the cavity define a hermetic chamber;
a third electrode arranged in the cavity and facing towards the first electrode, wherein the third electrode and the first electrode are arranged in the hermetic chamber; and
a second plate bonded to the second surface and having a mass, the second plate including an elastic support for elastically supporting the mass and a fourth electrode arranged on the mass facing towards the second electrode; and
a controller connected to the semiconductor sensor to determine whether the vehicle is moving based on the detected acceleration, wherein the controller transmits information of the detected tire air pressure when the vehicle is moving. - View Dependent Claims (9, 10, 11, 12)
-
-
13. A semiconductor sensor comprising:
-
an intermediate plate having a first surface and a second surface;
a pressure sensing portion defined on the first surface, the pressure sensing portion including;
a first electrode arranged on the first surface;
a first plate bonded to the first surface, the first plate having a cavity for forming a diaphragm, wherein the first plate, the intermediate plate, and the cavity define a hermetic chamber; and
a third electrode arranged in the cavity facing towards the first electrode, wherein the third electrode and the first electrode are arranged in the hermetic chamber; and
an acceleration sensing portion defined on the second surface, the acceleration sensing portion including;
a second electrode arranged on the second surface;
a second plate bonded to the second surface and having a mass;
an elastic support for elastically connecting the second plate and the mass; and
a fourth electrode arranged on the mass facing towards the second electrode.
-
-
14. A transmitter for use in an apparatus for monitoring the condition of a tire of a vehicle, the transmitter comprising:
-
a semiconductor sensor including a pressure sensing portion for detecting air pressure of the tire and an acceleration sensing portion for detecting acceleration, the pressure sensing portion and the acceleration sensing portion being formed integrally with each other; and
a controller connected to the semiconductor sensor for determining whether or not the vehicle is moving from the detected acceleration, wherein the controller transmits information of the detected tire air pressure when the vehicle is moving. - View Dependent Claims (15, 16, 17, 18)
-
Specification