Method for making an optical micromirror and micromirror or array of micromirrors obtained by said method
First Claim
1. A method for manufacturing an optical micro-mirror comprising a fixed part, a moveable part connected to the fixed part by articulation means, the moveable part comprising in addition reflection means;
- this method is characterized in that it comprises the following steps;
a) realization of a stack formed of a mechanical substrate (31), a sacrificial layer of a specific thickness of thermal oxidation material called the first layer (32, 42) and an assembly for forming the moveable part and comprising at least one layer of material called the second layer (41′
);
b) realization of the articulation means (47);
c) realization of the moveable part by etching of at least the second layer of material in such a way as to obtain at least one pattern;
d) removal of at least in part the sacrificial layer for clearing said moveable part that is then connected to the rest of the micro-mirror corresponding to the fixed part using the articulation means.
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Abstract
The invention relates to a method for manufacturing an optical micro-mirror comprising a fixed part, a moveable part, with reflection means connected to the stationary part by articulation means. This process is characterized in that it comprises the following steps:
a) realization of a stack comprised of a mechanical substrate (21), a first layer (22) of thermal oxidation material and at least one second layer (26) of material for forming the mobile part;
b) realization of the articulation means (27);
c) realization of the reflector means (29) on the second layer;
d) realization of the mobile part by etching of at least the second layer of material;
e) elimination of the thermal oxidation layer in order to liberate the moveable part.
Possible applications to optical routing or image projection systems.
24 Citations
27 Claims
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1. A method for manufacturing an optical micro-mirror comprising a fixed part, a moveable part connected to the fixed part by articulation means, the moveable part comprising in addition reflection means;
- this method is characterized in that it comprises the following steps;
a) realization of a stack formed of a mechanical substrate (31), a sacrificial layer of a specific thickness of thermal oxidation material called the first layer (32, 42) and an assembly for forming the moveable part and comprising at least one layer of material called the second layer (41′
);
b) realization of the articulation means (47);
c) realization of the moveable part by etching of at least the second layer of material in such a way as to obtain at least one pattern;
d) removal of at least in part the sacrificial layer for clearing said moveable part that is then connected to the rest of the micro-mirror corresponding to the fixed part using the articulation means. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
- this method is characterized in that it comprises the following steps;
Specification