High-G acceleration protection by caging
First Claim
7. A micromachined device comprising:
- a proof mass flexibly coupled to a substrate, the proof mass having a normal operating range of motion;
at least one non-suspended structure mounted on the substrate; and
an insulating member positioned between the proof mass and the substrate, the insulating member preventing electrical contact between the proof mass and the at least one non-suspended structure;
wherein a DC voltage applied between the proof mass and the at least one non-suspended structure causes the proof mass to move toward the non-suspended structure beyond the normal operating range of motion, the insulating member limiting the motion and preventing electrical contact between the proof mass and the at least one non-suspended structure.
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Accused Products
Abstract
For use in a MEMS device having a suspended proof mass, a method and apparatus for securing the MEMS device during a period of high acceleration. The method may include applying a DC voltage between the proof mass and a non-suspended structure of the device. The non-suspended structure may be mounted on a substrate, and the substrate or the non-suspended structure may be electrically isolated from the proof mass by an insulating layer or by one or more islands. Applying the DC voltage creates an electrostatic force that moves the proof mass toward (or holds the proof mass near) the substrate. Movement of the proof mass may be limited by mechanical contact between the proof mass and the insulating layer, the one or more islands, or by a cage mounted on the substrate during the period of high acceleration.
19 Citations
21 Claims
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7. A micromachined device comprising:
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a proof mass flexibly coupled to a substrate, the proof mass having a normal operating range of motion;
at least one non-suspended structure mounted on the substrate; and
an insulating member positioned between the proof mass and the substrate, the insulating member preventing electrical contact between the proof mass and the at least one non-suspended structure;
wherein a DC voltage applied between the proof mass and the at least one non-suspended structure causes the proof mass to move toward the non-suspended structure beyond the normal operating range of motion, the insulating member limiting the motion and preventing electrical contact between the proof mass and the at least one non-suspended structure. - View Dependent Claims (1, 2, 3, 4, 5, 6, 8, 9, 10, 11, 12, 14, 15)
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9-1. The micromachined device of claim 8, further comprising:
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a cage in a fixed positional relationship to the substrate, the cage being outside of the normal operating range of motion of the proof mass;
wherein the cage limits the motion of the proof mass in a direction parallel to the substrate when the DC voltage displaces the proof mass to a position toward the substrate that is beyond the normal operating range of motion of the proof mass.
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16. A micromachined device comprising:
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a proof mass flexibly coupled to a substrate, the proof mass having a normal operating range of motion;
at least one non-suspended structure mounted on the substrate; and
a layer of insulating or semi-insulating material positioned between the proof mass and the substrate, the layer preventing electrical contact between the proof mass and the at least one non-suspended structure;
wherein a DC voltage applied between the proof mass and the at least one non-suspended structure displaces the proof mass to a position beyond the normal operating range of motion of the proof mass. - View Dependent Claims (17, 18, 19, 20, 21)
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Specification