Large tilt angle MEM platform

• US 20040090144A1
• Filed: 10/30/2003
• Published: 05/13/2004
• Est. Priority Date: 09/27/2001
• Status: Active Grant

• Current Assignee: NeoPhotonics Corporation (Lumentum Holdings Inc.)
• Original Assignee: MEMX, Inc. (Lumentum Holdings Inc.)
• Inventors: Rodgers, Murray Steven, Sniegowski, Jeffry Joseph, Miller, Samuel Lee, Barnes, Stephen Matthew, McWhorter, Paul Jackson
• Granted Patent: US 6,831,391 B2
• Time in Patent Office: Days
• US Class Current: 310/309
• CPC Class Codes: B33Y 80/00 Products made by additive manufacturing
• CPC Class Codes: B81B 3/0062 Devices moving in two or more dimensions, i.e. having special features which allow movement in more than one dimension
• CPC Class Codes: H02N 1/006 of the gap-closing type H02N1/004 takes precedence
• CPC Class Codes: H02N 1/008 Laterally driven motors, e.g. of the comb-drive type

Abstract

The present invention provides a MEM system (10) having a platform (14) that is both elevatable from the substrate (12) on which it is fabricated and tiltable with one, two or more degrees of freedom with respect to the substrate (12). In one embodiment, the MEM system (10) includes the platform (14), a pair of A-frame structures (40), and two pairs of actuators (30) formed on the substrate (12). Ends (46A) of rigid members (46) extending from apexes (40A) of the A-frame structures (40) are attached to the platform (14) by compliant members (48A, 48B). The platform (14) is also attached to the substrate (12) by a compliant member (48C). The A-frame structures (40) are separately pivotable about bases (40B) thereof. Each pair of actuators (30) is coupled through a yoke (32) and displacement multiplier (34) to one of the A-frame structures (40) and is separately operable to effect pivoting of the A-frame structures (40) with respect to the substrate (12) by equal or unequal angular amounts. Upon pivoting, the A-frame structures (40) act as lever arms to both lift the platform (14) and tilt the platform (14) with respect to the substrate (12) with at least one degree of freedom. Since the platform (14) lifts up from the surface of the substrate (12), it may be tilted at large angles with respect to the substrate (12).

Claims

1. A microelectromechanical system comprising:

a substrate;

a platform attached to said substrate in a manner permitting said platform to be elevated in its entirety from said substrate; and

a lever arm attached to said substrate and pivotable in at least a first direction with respect to said substrate;

said platform being attached to said lever arm in a manner providing for inclination of said platform in at least the first direction in response to pivoting of said lever arm in the first direction.

2. The system of claim 1 wherein said lever arm comprises an A-frame structure.

3. The system of claim 2 further comprising:

at least one flexible member attaching a base of said A-frame structure to said substrate, said at least one flexible member being configured to permit pivoting of said A-frame structure in at least the first direction with respect to said substrate.

4. The system of claim 1 further comprising:

a first compliant member attaching said platform to said substrate, said first compliant member being configured to permit elevation of said platform from said substrate to a desired height; and

a second compliant member attaching said lever arm to said platform, said second compliant member being configured to transmit force from said lever arm to said platform while permitting a point on said lever wherein said second compliant member is connected to swing through a first arc having a different radius than a second arc through which a point on said platform wherein said second compliant member is connected swings.

5. The system of claim 4 wherein the second arc has a smaller radius than the first arc.

6. The system of claim 4 wherein said first and second compliant members comprise springs.

7. The system of claim 1 wherein said platform is attached to said substrate and said lever arm in a manner providing for a change in an angle of inclination of said platform in the first direction with respect to said substrate exceeding a change in an angle of pivot of said lever arm in the first direction with respect to said substrate upon pivoting of said lever arm in the first direction with respect to said substrate.

8. The system of claim 7 wherein said platform is attached to said substrate at a first location, said lever arm is attached to said platform at a second location, and said lever arm is attached to said substrate at a third location, said first location being between said second and third locations.

9. The system of claim 1 further comprising:

an actuator microstructure formed on said substrate, said actuator microstructure being coupled to said lever arm such that said actuator microstructure is operable to effect pivoting of said lever arm in at least the first direction with respect to said substrate.

10. The system of claim 9 wherein said actuator microstructure is operable without external feedback control to effect pivoting of said lever arm in at least the first direction with respect to said substrate such that said platform is inclinable in at least the first direction at any desired angle with respect to said substrate within a specified range of angles.

11. The system of claim 10 wherein the specified range of angles is between zero and ninety degrees.

12. The system of claim 10 wherein said actuator microstructure comprises an electrostatic actuator operable in response to a control voltage applied across terminals thereof.

13. The system of claim 9 further comprising:

a tether coupling a laterally moveable output of said actuator microstructure to said lever arm.

14. The system of claim 13 further comprising:

a displacement multiplier coupling said tether to said laterally moveable output of said actuator microstructure, said displacement multiplier being configured for amplifying lateral movement of said moveable output of said actuator microstructure into larger lateral movement of said tether.

15. The system of claim 13 wherein said actuator microstructure comprises a plurality of separate actuators having separate laterally moveable outputs, and said system further comprises:

a yoke coupling said laterally moveable outputs of said plurality of separate actuators together.

16. The system of claim 1 further comprising:

at least one fuse securing said platform to said substrate, said at least one fuse being configured for releasing said platform from said substrate upon at least one of application of at least a predetermined voltage across said fuse and application of a pulse of electromagnetic energy to said fuse.

17. The system of claim 1 further comprising:

at least one pre-stressed elevator attached to said substrate, said pre-stressed elevator being configured for elevating said platform to a predetermined height from said substrate upon release of said platform.

18. The system of claim 1 wherein said platform is inclinable in at least the first direction at an angle with respect to said substrate exceeding forty-five degrees.

19. The system of claim 1 wherein said platform includes at least one of an optically reflective surface, a diffraction grating, a lens, and an optical polarizer.