Plasma processing device
First Claim
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1. A plasma processing apparatus, characterized by:
- a processing vessel defined by a wall and provided with a stage for holding a substrate to be processed;
a microwave transmission window provided on said processing vessel so as to face said substrate to be processed on said stage, said microwave transmission window being provided as a part of said wall of said processing vessel;
a plasma gas supplying part supplying a plasma gas into said processing vessel; and
a microwave antenna provided on said processing vessel in correspondence to said microwave, said microwave transmission window having a concaved inner surface at a side facing said substrate to be processed, such that a separation between said inner surface and a plane coincident to a surface of said substrate to be processed decreases in a radially outward direction of said microwave transmission window.
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Abstract
In a microwave plasma processing apparatus, a shower plate or plasma transmission window facing a substrate to be processed is formed to have a concaved surface at a side facing the substrate to be processes for compensating for a decrease of plasma density in the peripheral region of the substrate to be processed. As a result, stable and uniform plasma is maintained in the vicinity of the surface of the substrate to be processed even in the case a low pressure plasma process such as etching is conducted. Further, such a construction facilitates plasma ignition.
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Citations
21 Claims
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1. A plasma processing apparatus, characterized by:
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a processing vessel defined by a wall and provided with a stage for holding a substrate to be processed;
a microwave transmission window provided on said processing vessel so as to face said substrate to be processed on said stage, said microwave transmission window being provided as a part of said wall of said processing vessel;
a plasma gas supplying part supplying a plasma gas into said processing vessel; and
a microwave antenna provided on said processing vessel in correspondence to said microwave, said microwave transmission window having a concaved inner surface at a side facing said substrate to be processed, such that a separation between said inner surface and a plane coincident to a surface of said substrate to be processed decreases in a radially outward direction of said microwave transmission window. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21)
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Specification