Composite sensor membrane

• US 20040096357A1
• Filed: 04/21/2003
• Published: 05/20/2004
• Est. Priority Date: 11/15/2002
• Status: Active Grant

• Current Assignee: Regents of the University of California (University of California)
• Original Assignee: Regents of the University of California (University of California)
• Inventors: Yue, Min, Majumdar, Arun, Satyanarayana, Srinath
• Granted Patent: US 7,344,678 B2
• Time in Patent Office: Days
• US Class Current: 422/82.01
• CPC Class Codes: G01N 33/54373 involving physiochemical end-point determination, e.g. wave-guides, FETS, gratings
• CPC Class Codes: Y10T 428/31681 Next to polyester, polyamide or polyimide [e.g., alkyd, glue, or nylon, etc.]
• CPC Class Codes: Y10T 428/31692 Next to addition polymer from unsaturated monomers
• CPC Class Codes: Y10T 428/31721 Of polyimide
• CPC Class Codes: Y10T 428/31855 Of addition polymer from unsaturated monomers

Abstract

A sensor may include a membrane to deflect in response to a change in surface stress, where a layer on the membrane is to couple one or more probe molecules with the membrane. The membrane may deflect when a target molecule reacts with one or more probe molecules.

Claims

1. A sensor, comprising:

a membrane to deflect in response to a change in surface stress; and

a layer on the membrane, the layer to couple one or more probe molecules with the membrane.

2. The sensor of claim 1, further including one or more probe molecules coupled with the membrane.

3. The sensor of claim 1, wherein the membrane includes a first portion fixed to a region of a substrate and a second portion fixed to a different region of the substrate.

4. The sensor of claim 1, wherein the membrane comprises a polymer.

5. The sensor of claim 4, wherein the polymer is chosen from the group consisting of polyimide and parylene.

6. The sensor of claim 1, wherein substantially all of a perimeter region of the membrane is fixed to one or more structures.

7. The sensor of claim 1, wherein the layer comprises a material chosen from the group consisting of gold and silicon dioxide.

8. The sensor of claim 1, wherein a portion of a first side of the membrane is covered by the layer.

9. The sensor of claim 8, wherein the portion is between about 5% and about 90%.

10. The sensor of claim 8, wherein the portion is between about 10% and about 70%.

11. A system, comprising:

a substrate;

a membrane coupled with the substrate and spanning a well in the substrate;

a layer on the membrane, the layer to couple one or more probe molecules with the membrane;

another membrane coupled with the substrate and spanning another well in the substrate;

a layer on the another membrane, the layer to couple one or more probe molecules with the membrane;

a cover to enclose the well and the another well;

a channel to provide fluid to the membrane; and

another channel to provide fluid to the another membrane.

12. The system of claim 11, wherein the channel is formed in the substrate.

13. The system of claim 11, wherein the channel is formed in the cover.

14. The system of claim 11, wherein the cover is to transmit light to sense deflection of the membrane.

15. The system of claim 11, wherein the membrane comprises a polymer.

16. The system of claim 15, wherein the polymer is chosen from the group consisting of parylene and polyimide.

17. The system of claim 11, wherein the layer on the membrane comprises a material chosen from the group consisting of gold and silicon dioxide.

18. The system of claim 11, further comprising one or more probe molecules coupled with the membrane.

19. The system of claim 18, further comprising one or more different probe molecules coupled with the another membrane.

20. A method, comprising:

introducing fluid into a region proximate to a membrane, the fluid including one or more target molecules to be sensed, at least some of the one or more target molecules subsequently interacting with one or more probe molecules coupled with a layer on the membrane and causing a deflection of the membrane; and

measuring the deflection of the membrane.

21. The method of claim 20, further including introducing a different fluid into another region proximate a different membrane, the another fluid including one or more different target molecules to be sensed, at least some of the one or more different target molecules subsequently interacting with one or more different probe molecules coupled with a layer on the different membrane and causing a deflection of the different membrane;

and

measuring the deflection of the different membrane.

22. The method of claim 20, wherein measuring a deflection of the membrane comprises using an electrical detection method.

23. The method of claim 22, wherein the electrical detection method is chosen from the group consisting of a piezoelectric detection method and a piezoresistive detection method.

24. The method of claim 20, wherein measuring a deflection of the membrane comprises reflecting light off the membrane.

25. The method of claim 20, wherein measuring a deflection of the membrane further comprises reflecting light off a reference surface.

26. The method of claim 20, wherein measuring a deflection of the membrane comprises using Fabry-Perot interferometry.

27. The method of claim 20, wherein measuring a deflection of the membrane comprises using Michelson interferometry.