Integrated device for amplification and other biological tests, and manufacturing process thereof
First Claim
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28. ) (NEW) An integrated device for amplification reactions, comprising:
- a) a monolithic semiconductor material body having a surface;
b) at least one buried channel extending in said semiconductor material body, arranged at a distance from said surface, and having a first and a second end;
c) at least one inlet port and outlet port extending from said surface respectively as far as said first end and second end of said buried channel, and being in fluid connection with said buried channel; and
d) at least one heating element arranged on said semiconductor material body.
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Abstract
The integrated device for amplification and other biological tests comprises a semiconductor material body having a surface; a plurality of buried channels extending in the semiconductor material body at a distance from the surface of the semiconductor material body; inlet and outlet ports extending from the surface of the semiconductor material body as far as the ends of the buried channels and being in fluid connection with the buried channels; and heating elements on the semiconductor material body. Temperature sensors are arranged between the heating elements above the surface of the semiconductor material body.
41 Citations
59 Claims
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28. ) (NEW) An integrated device for amplification reactions, comprising:
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a) a monolithic semiconductor material body having a surface;
b) at least one buried channel extending in said semiconductor material body, arranged at a distance from said surface, and having a first and a second end;
c) at least one inlet port and outlet port extending from said surface respectively as far as said first end and second end of said buried channel, and being in fluid connection with said buried channel; and
d) at least one heating element arranged on said semiconductor material body. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 56, 57, 58, 59)
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36. ) (NEW) A process for manufacturing an integrated device for amplification reactions, comprising:
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a) forming a monolithic semiconductor material body having a surface;
b) forming at least a buried channel extending in said semiconductor material body, arranged at a distance from said surface, and having a first and a second end;
c) forming at least a first and a second port extending from said surface respectively as far as said first and second ends of said buried channel, and being in fluid connection with said buried channel; and
d) forming at least a heating element on said semiconductor material body. - View Dependent Claims (37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47)
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48. ) (NEW) A device for biological tests comprising:
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a) a plurality of buried channels formed a predetermined distance beneath a surface of a monolithic semiconductor material body;
b) at least one port formed in the semiconductor material body and in fluid communication with the surface of the semiconductor material body and with first and second ends, respectively, of the at least one buried channel; and
c) at least one heating element formed on the surface of the semiconductor material body and positioned over the at least one buried channel to heat fluid in the at least one buried channel. - View Dependent Claims (49)
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50. ) (NEW) A method for manufacturing a device for biological tests, comprising:
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a) forming at least one buried channel a predetermined distance beneath a surface of a monolithic semiconductor material body;
b) forming first and second ports in the semiconductor material body to be in fluid communication with the surface of the semiconductor material body and with first and second ends, respectively, of the at least one buried channel; and
c) forming at least one heating element on the surface of the semiconductor material body to be positioned over the at least one buried channel for heating fluid in the at least one buried channel. - View Dependent Claims (51)
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52. ) (NEW) An integrated device for biological tests, comprising:
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a) a monolithic semiconductor material body having a surface;
b) a plurality of buried channels extending parallel and adjacent to each other in said semiconductor material body, arranged at a distance from said surface, and each buried channel having a first and a second end;
c) at least one first port and second port extending from said surface respectively as far as said first end and second end of each buried channel, and being in fluid connection with each buried channel; and
d) at least one heating element arranged on said semiconductor material body.
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53. ) (NEW) A process for manufacturing an integrated device for biological tests, comprising:
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a) forming a substrate of semiconductor material;
b) forming surface trenches in said substrate;
c) forming a semiconductor layer on a surface in said substrate to form at least a buried channel extending in said semiconductor material body, arranged at a distance from said surface, and having a first end and a second end;
d) forming at least a first and a second port extending from said surface respectively as far as said first and second ends of said buried channel, and being in fluid connection with said buried channel; and
e) forming at least a heating element on said semiconductor material body.
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54. ) (NEW) A process for manufacturing an integrated device for biological tests, comprising:
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a) forming a monocrystalline substrate;
b) forming a channel in said monocrystalline substrate;
c) forming a semiconductor layer on a surface of said monocrystalline substrate and over said channel to form at least a buried channel extending in said semiconductor material body, arranged at a distance from said surface, and having a first and a second end;
d) forming at least a first and a second port extending from said surface respectively as far as said first and second ends of said buried channel, and being in fluid connection with said buried channel; and
e) forming at least a heating element on said semiconductor material body.
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55. ) (NEW) A device for biological tests comprising:
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a) a plurality of buried channels formed a predetermined distance beneath a surface of a monolithic semiconductor material body;
b) at least one port formed in the semiconductor material body and in fluid communication with the surface of the semiconductor material body and with first and second ends, respectively, of the at least one buried channel.
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Specification