Method for producing and testing a corrosion-resistant channel in a silicon device
First Claim
1. A method for protecting a wetted path of a silicon device from corrosion by fluorine atoms and for testing the adequacy of the protection, the method comprising:
- coating the wetted path with a material that can be passivated by fluorine atoms;
exposing the wetted path to a gas environment, which includes fluorine atoms, that will passivate the material and corrode any exposed silicon in the wetted path;
testing the silicon device in a manner where corrosion in the wetted path is likely to cause failure of the silicon device; and
in response to the silicon device operating satisfactorily during such testing, determining that the wetted path is protected from corrosion by fluorine atoms.
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Accused Products
Abstract
A method for producing a corrosion-resistant channel in a wetted path of a silicon device enables such device to be used with corrosive compounds, such as fluorine. A wetted path of a MEMS device is coated with either (1) an organic compound resistant to attack by atomic fluorine or (2) a material capable of being passivated by atomic fluorine. The device is then exposed to a gas that decomposes into active fluorine compounds when activated by a plasma discharge. One example of such a gas is CF4, an inert gas that is easier and safer to work with than volatile gases like ClF3. The gas will passivate the material (if applicable) and corrode any exposed silicon. The device is tested in such a manner that any unacceptable corrosion of the wetted path will cause the device to fail. If the device operates properly, the wetted path is deemed to be resistant to corrosion by fluorine or other corrosive compounds, as applicable.
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Citations
21 Claims
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1. A method for protecting a wetted path of a silicon device from corrosion by fluorine atoms and for testing the adequacy of the protection, the method comprising:
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coating the wetted path with a material that can be passivated by fluorine atoms;
exposing the wetted path to a gas environment, which includes fluorine atoms, that will passivate the material and corrode any exposed silicon in the wetted path;
testing the silicon device in a manner where corrosion in the wetted path is likely to cause failure of the silicon device; and
in response to the silicon device operating satisfactorily during such testing, determining that the wetted path is protected from corrosion by fluorine atoms. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. A method for protecting a wetted path of a silicon device from corrosion by a fluid and for testing the adequacy of the protection, the method comprising:
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coating the wetted path with an organic compound that protects silicon from corrosion by the fluid and that is non-reactive or slowly reactive to fluorine;
exposing the wetted path to a gas environment, which includes fluorine atoms, that will corrode any exposed silicon in the wetted path;
testing the silicon device in a manner where corrosion of the wetted path is likely to cause failure of the silicon device; and
in response to the silicon device operating satisfactorily during such testing, determining that the wetted path is protected from corrosion by fluorine atoms. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21)
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Specification