Method and systme for managing semiconductor manufacturing equipment
First Claim
1. A method of managing the operation of semiconductor manufacturing equipment comprising the steps of:
- sampling a plurality of data of at least one parameter under a normal operating condition of said semiconductor manufacturing equipment;
generating a Mahalanobis space on the basis of a group of sampled data;
calculating, on the basis of said Mahalanobis space, a Mahalanobis distance from a group of measured values of said parameters under the actual operating condition of said semiconductor manufacturing equipment; and
when a calculated Mahalanobis distance exceeds a predetermined value, making a decision that a malfunction occurred in said semiconductor manufacturing equipment.
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Accused Products
Abstract
A management method capable of making an accurate decision about a malfunction of the semiconductor manufacturing equipment comprises the steps of: sampling a plurality of data of at least one parameter under normal operating condition of the semiconductor manufacturing equipment (11); generating a Mahalanobis space A from a group of sampled data; calculating a Mahalanobis distance D2 from measured values of the parameter under ordinary operating condition of the semiconductor manufacturing equipment (11); and deciding that a malfunction occurred in the semiconductor manufacturing equipment (11) when the value of the Mahalanobis distance exceeds a predetermined value.
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Citations
8 Claims
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1. A method of managing the operation of semiconductor manufacturing equipment comprising the steps of:
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sampling a plurality of data of at least one parameter under a normal operating condition of said semiconductor manufacturing equipment;
generating a Mahalanobis space on the basis of a group of sampled data;
calculating, on the basis of said Mahalanobis space, a Mahalanobis distance from a group of measured values of said parameters under the actual operating condition of said semiconductor manufacturing equipment; and
when a calculated Mahalanobis distance exceeds a predetermined value, making a decision that a malfunction occurred in said semiconductor manufacturing equipment. - View Dependent Claims (2, 3)
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4. A management system of semiconductor manufacturing equipment comprising:
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a memory unit for storing data on a Mahalanobis space obtained from a parameter showing a normal operating condition of semiconductor manufacturing equipment;
a detection mechanism for obtaining data values of said parameter from said semiconductor manufacturing equipment in operation;
an arithmetic circuit for calculating a Mahalanobis distance from a data group of said parameter, obtained by said detection mechanism by using said Mahalanobis space stored in said memory unit; and
a circuit for deciding whether or not a calculated value of said Mahalanobis distance by said arithmetic circuit exceeds a predetermined value. - View Dependent Claims (5, 6, 7, 8)
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Specification