Vibration damping devices and methods

• US 20040100007A1
• Filed: 11/21/2002
• Published: 05/27/2004
• Est. Priority Date: 11/21/2002
• Status: Abandoned Application

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Hazelton, Andrew J., Engwall, Mats Anders
• Application Number:
  US10/303,324
• Publication Number:
  US 20040100007A1
• Time in Patent Office: Days
• US Class Current: 267/140.13
• CPC Class Codes: F16F 15/03 using magnetic or electromagnetic means F16F9/53, F16F15/005 take precedence
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation

Abstract

Vibration of a member supported by another member is damped by detecting the changes in the width of a gap between the members and applying an electrical force between the members in a time-dependent manner. The detection of the changes in the width of the gap may be carried out by an optical displacement sensor or by a capacitive displacement sensor. The electrical force is applied by attaching electrodes on mutually opposite surfaces of the members and connecting them to a voltage source such that their voltages can be varied or to a current source such that mutually parallel and/or antiparallel currents can flow through them. Vibration damping devices structured for using such a vibration damping method can provide shock-absorbing mounts to apparatus of different kinds such as lithography exposure apparatus having an optical frame supported by a base frame, a workpiece being placed on the base frame and the optical frame supporting an optical system for irradiating the workpiece with radiative energy.

Claims

1. An apparatus, comprising:

a first electrode attached to a first surface of a supporting member;

a second electrode attached to a second surface of a vibrating member, said first electrode and said second electrode defining a gap therebetween;

a displacement sensor that outputs a signal indicative of a change in said width of said gap caused by vibrations of said vibrating member; and

a controller connected to the first electrode, the second electrode and the displacement sensor, the controller configured to receive said signal from said displacement sensor and to apply an electrical force between said first electrode and said second electrode according to said signal so as to damp said vibrations.

2. The apparatus of claim 1 wherein said controller applies a specified voltage to at least one of said first electrode and said second electrode in a time-dependent manner.

3. The apparatus of claim 1 wherein said controller causes electric currents to flow through said first electrode and said second electrode in parallel and antiparallel directions.

4. The apparatus of claim 1 wherein said displacement sensor is a capacitive displacement sensor serving to measure the capacitance between two electrodes affixed individually to said first surface and said second surface.

5. The apparatus of claim 1 wherein said displacement sensor is an optical displacement sensor.

6. The apparatus of claim 2 wherein said controller includes a voltage source that applies a constant voltage and a switch that applies said constant voltage to at least a selected one of said first electrode and said second electrode in said time-dependent manner.

7. The apparatus of claim 2 wherein said controller includes a voltage source that applies a constant voltage difference and a switch that applies said constant voltage between said first electrode and said second electrode in said time-dependent manner.

8. The apparatus of claim 3 wherein said controller includes a current source that causes said electric currents to flow through said first electrode and said second electrode and a switch that passes said currents selectively parallel or antiparallel to each other in a time-dependent manner according to said signal.

9. A method of damping vibrations of a vibrating member supported by a supporting member, said supporting member having a first surface, said vibrating member having a second surface, said method comprising the steps of:

attaching a first electrode on said first surface of said supporting member;

attaching a second electrode on said second surface of said vibrating member, said first electrode and said second electrode defining a gap therebetween with a specified width;

generating a signal indicative of a change in said width of said gap caused by a vibration of said vibrating member; and

applying an electrical force between said first electrode and said second electrode according to said signal so as to damp said vibration.

10. The method of claim 9 wherein said electrical force is an electrostatic force and is applied by applying a specified voltage to at least one of said first and second electrodes in a time-dependent manner.

11. The method of claim 9 wherein said electrical force is applied by causing electric currents to flow through said first electrode and said second electrode selectively in parallel and antiparallel directions in a time-dependent manner.

12. The method of claim 9 wherein said signal is generated by detecting said gap by an optical sensor.

13. The method of claim 9 wherein said signal is generated by detecting said gap capacitively by measuring capacitance between two electrodes placed respectively on said first and second surfaces.

14. A lithography exposure apparatus comprising:

a base frame supporting a workpiece, said base frame including a first member having a first facing surface;

an optical frame supporting an optical device that irradiates said workpiece with radiative energy, said optical frame including a second member supported by said first member, said second member having a second;

a first electrode attached to said first surface of said first member;

a second electrode attached to said second surface of said second member, said first electrode and said second electrode defining a gap therebetween;

a displacement sensor that outputs a signal indicative of a change in said width of said gap caused by vibrations of said second member with respect to said first member; and

a controller connected to the first electrode, the second electrode, and the displacement sensor, the controller receiving said signal from said displacement sensor and applying an electrical force between said first electrode and said second electrode according to said signal so as to dampen said vibrations.

15. An object manufactured with the lithography exposure apparatus of claim 14.

16. A wafer on which an image has been formed by the lithography exposure apparatus of claim 14.

17. A method for making an object using a lithography exposure apparatus of claim 14.

18. A method of patterning a wafer using a lithography process, wherein the lithography process utilizes a lithography exposure apparatus as recited in claim 14.

19. An apparatus comprising:

a wafer table having a first electrode;

a mirror assembly affixed to the wafer table, the mirror assembly having a second electrode, the first electrode and the second electrode defining a gap between the mirror assembly and the wafer table;

a displacement sensor that generates an output signal indicative of a change in the width of the gap caused by vibrations between the wafer table and the mirror assembly; and

a controller connected to the first and second electrodes and the displacement sensor, the controller configured to receive the output signal from the displacement sensor and to apply an electrical force between the first electrode and the second electrode according to the output signal.

20. The apparatus of claim 19, wherein the displacement sensor generates the output signal indicative of changes in the gap width by measuring changes in the capacitance between the first electrode and the second electrode.

21. The apparatus of claim 19, wherein the first electrode is attached to a first surface of said wafer table, the second electrode is attached to a second surface of said mirror assembly, the first surface and the second surface are substantially parallel and oppositely facing.

22. The apparatus of claim 21 further comprising:

a mirror attached to the mirror assembly, the mirror having a reflecting surface substantially parallel to the second surface of the mirror assembly; and

a measurement system configured to generate a measurement beam that makes incidence onto the mirror substantially perpendicularly to the reflecting surface.