Spatial light modulators with light absorbing areas
First Claim
Patent Images
1. A spatial light modulator comprising:
- a substrate having an array of electrodes and circuitry thereon; and
an array of micromirrors held above the array of electrodes and circuitry;
wherein the micromirrors comprise a hinge portion and a plate portion connected to the hinge portion, wherein the plate portion or the hinge portion comprise a light absorbing material that absorbs at least 50% or visible light incident thereon.
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Abstract
A projection system, a spatial light modulator, and a method for forming micromirrors are disclosed. A substrate comprises circuitry and electrodes for electrostatically deflecting micromirror elements that are disposed within an array of such elements forming the spatial light modulator. In one embodiment, the substrate is a silicon substrate having circuitry and electrodes thereon for electrostatically actuating adjacent micromirror elements, and the substrate is fully or selectively covered with a light absorbing material.
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Citations
49 Claims
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1. A spatial light modulator comprising:
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a substrate having an array of electrodes and circuitry thereon; and
an array of micromirrors held above the array of electrodes and circuitry;
wherein the micromirrors comprise a hinge portion and a plate portion connected to the hinge portion, wherein the plate portion or the hinge portion comprise a light absorbing material that absorbs at least 50% or visible light incident thereon. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25)
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26. A spatial light modulator comprising:
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a substrate having an array of electrodes and circuitry thereon;
an array of micromirrors held above the array of electrodes and circuitry;
wherein the micromirrors comprise a hinge portion and a plate portion connected to the hinge portion, wherein the plate portion or the hinge portion comprise a black or dark colored thin film ceramic or metal alloy. - View Dependent Claims (27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49)
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Specification