Method and apparatus for calibrating an x-ray laminography imaging system
First Claim
1. An x-ray laminography imaging system that utilizes a stationary x-ray source and generates a moving pattern of x-ray spots on a target anode synchronously with rotation of an x-ray detector to reduce or eliminate the need to move an object being imaged, the system comprising:
- first logic configured to gather empirical calibration data generated during physical calibration of the system during which a stationary x-ray source generates a moving pattern of x-ray spots on a target anode synchronously with rotation of an x-ray detector, the empirical data corresponding to offsets to locations at which the x-ray spots are formed on the target anode;
second logic configured to analytically derive calibration data from the empirical data; and
third logic configured to calibrate the system using the empirical data and the analytically-derived calibration data.
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Abstract
An x-ray laminography imaging system and an apparatus and method for calibrating the system. The x-ray laminography imaging system utilizes a stationary x-ray source and generates a moving pattern of x-ray spots on a target anode synchronously with rotation of an x-ray detector to reduce or eliminate the need to move an object being imaged. The present invention provides an apparatus and a method for calibrating the system based in part on empirical data gathered during physical calibration and in part on data analytically derived from the empirical data. Because calibration of the system can be performed in great part analytically rather than relying entirely on empirically generated data, the calibration process can be performed very quickly.
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Citations
34 Claims
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1. An x-ray laminography imaging system that utilizes a stationary x-ray source and generates a moving pattern of x-ray spots on a target anode synchronously with rotation of an x-ray detector to reduce or eliminate the need to move an object being imaged, the system comprising:
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first logic configured to gather empirical calibration data generated during physical calibration of the system during which a stationary x-ray source generates a moving pattern of x-ray spots on a target anode synchronously with rotation of an x-ray detector, the empirical data corresponding to offsets to locations at which the x-ray spots are formed on the target anode;
second logic configured to analytically derive calibration data from the empirical data; and
third logic configured to calibrate the system using the empirical data and the analytically-derived calibration data. - View Dependent Claims (2)
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3. An x-ray laminography imaging system that utilizes a stationary x-ray source and generates a moving pattern of x-ray spots on a target anode synchronously with rotation of an x-ray detector to reduce or eliminate the need to move an object being imaged, the system comprising:
a processor, the processor generating control signals and causing said control signals to be delivered to a controllable deflection yoke, the controllable deflection yoke controlling particular locations on the target anode upon which x-rays projected by an x-ray source along a Z-axis impinge, the target anode oriented substantially parallel to a plane that is substantially orthogonal to the Z-axis, the x-rays projected along the Z-axis impinging at particular locations on said target anode, said locations being dependent on control signals received by the controllable deflection yoke that cause the deflection yoke to direct x-rays onto said particular locations on the target anode to form substantially circular x-ray spot patterns on the target anode, each x-ray spot pattern being produced by movement of an x-ray spot in a substantially circular pattern, each x-ray spot corresponding to a beam of x-rays impinging on one of said particular locations on the target anode, the control signals causing the deflection yoke to form at least one substantially circular on-axis x-ray spot pattern on said target anode about the Z-axis and to form at least one substantially circular off-axis x-ray spot pattern on the target anode about an axis that is substantially parallel to the Z-axis, and wherein the processor determines the control signals needed to be delivered to the deflection yoke to cause said at least one off-axis x-ray spot pattern to be formed based on data associated with said at least one on-axis x-ray spot pattern. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An apparatus for calibrating an x-ray laminography imaging system, the system utilizing a stationary x-ray source, a rotatably mounted detector, and generating a moving pattern of x-ray spots on a target anode to reduce or eliminate the need to move an object being imaged, the apparatus comprising:
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first logic, the first logic determining control signals needed to be delivered to a deflection yoke to cause at least one substantially circular on-axis x-ray spot pattern to be formed on a target anode about a Z-axis to simulate rotation of an x-ray source, the target anode lying in an X, Y plane that is substantially orthogonal to the Z-axis, each spot of the x-ray spot pattern formed on the target anode having an X-coordinate and a Y-coordinate;
second logic, the second logic processing data to determine offsets to the X, Y coordinates of the x-ray spots of the pattern on the target anode, wherein the data is gathered through calibration of the system as a rotating x-ray detector is synchronized to the motion of the x-ray spots about the Z-axis that form the on-axis x-ray spot pattern;
third logic, the third logic using the offsets to offset the X, Y coordinates of the x-ray spots of the on-axis x-ray spot pattern as they x-ray spot pattern is being formed on the target anode, thereby causing an offset on-axis x-ray spot pattern to be formed on the target anode about the Z-axis; and
fourth logic, the fourth logic using the x-ray spot offsets associated with the on-axis x-ray spot pattern to determine a substantially circular off-axis x-ray spot pattern to be formed on the target anode about an axis that is substantially parallel to the Z-axis. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23)
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24. A method for calibrating an x-ray laminography imaging system, the system utilizing a stationary x-ray source, a rotatably mounted detector, and generating a moving pattern of x-ray spots on a target anode to reduce or eliminate the need to move an object being imaged, the method comprising the steps of:
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determining control signals needed to be delivered to a deflection yoke to cause at least one substantially circular on-axis x-ray spot pattern to be formed on a target anode about a Z-axis to simulate rotation of an x-ray source, the target anode lying in an X, Y plane that is substantially orthogonal to the Z-axis, each spot of the x-ray spot pattern formed on the target anode having an X-coordinate and a Y-coordinate;
processing data to determine offsets to the X, Y coordinates of the x-ray spots of the pattern on the target anode, wherein the data is gathered through calibration of the system as a rotating x-ray detector is synchronized to the motion of the x-ray spots about the Z-axis that form the on-axis x-ray spot pattern;
using the offsets to offset the X, Y coordinates of the x-ray spots of the on-axis x-ray spot pattern as they x-ray spot pattern is being formed on the target anode, thereby causing an offset on-axis x-ray spot pattern to be formed on the target anode about the Z-axis; and
using the x-ray spot offsets associated with the on-axis x-ray spot pattern to determine a substantially circular off-axis x-ray spot pattern to be formed on the target anode about an axis that is substantially parallel to the Z-axis. - View Dependent Claims (25, 26, 27, 28, 29, 30, 31, 32, 33)
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34. A computer program for calibrating an x-ray laminography imaging system, the system utilizing a stationary x-ray source, a rotatably mounted detector, and generating a moving pattern of x-ray spots on a target anode to reduce or eliminate the need to move an object being imaged, the computer program being embodied on a computer-readable medium, the program comprising:
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a first code segment for determining control signals needed to be delivered to a deflection yoke to cause at least one substantially circular on-axis x-ray spot pattern to be formed on a target anode about a Z-axis to simulate rotation of an x-ray source, the target anode lying in an X, Y plane that is substantially orthogonal to the Z-axis, each spot of the x-ray spot pattern formed on the target anode having an X-coordinate and a Y-coordinate;
a second code segment for processing data to determine offsets to the X, Y coordinates of the x-ray spots of the pattern on the target anode, wherein the data is gathered through calibration of the system as a rotating x-ray detector is synchronized to the motion of the x-ray spots about the Z-axis that form the on-axis x-ray spot pattern;
a third code segment that uses the offsets to offset the X, Y coordinates of the x-ray spots of the on-axis x-ray spot pattern as they x-ray spot pattern is being formed on the target anode, thereby causing an offset on-axis x-ray spot pattern to be formed on the target anode about the Z-axis; and
a fourth code segment that uses the x-ray spot offsets associated with the on-axis x-ray spot pattern to determine a substantially circular off-axis x-ray spot pattern to be formed on the target anode about an axis that is substantially parallel to the Z-axis.
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Specification