Systems and methods for overcoming stiction
First Claim
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1. A method for overcoming stiction in an electromechanical system, the method comprising:
- providing a base layer;
providing a contact area, wherein the contact area comprises a portion of the base layer or a stop disposed thereon;
providing a structural plate, wherein a side of the structural plate is in contact with the contact area, and wherein a stiction force impedes movement of the structural plate away from the contact area; and
producing a vibration local to the contact area and sufficient to overcome the stiction force.
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Abstract
A number of methods and systems for overcoming stiction are provided. The systems include electromechanical systems capable of exerting a variety of forces upon areas prone to stiction. The systems can be MEMS arrays or other types of devices where stiction related forces occur. The methods include a variety of ways of causing movement in areas prone to stiction forces. Such movement can be vibrational in nature and is sufficient to overcome stiction, allowing a trapped element to be moveed to a desired location.
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Citations
91 Claims
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1. A method for overcoming stiction in an electromechanical system, the method comprising:
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providing a base layer;
providing a contact area, wherein the contact area comprises a portion of the base layer or a stop disposed thereon;
providing a structural plate, wherein a side of the structural plate is in contact with the contact area, and wherein a stiction force impedes movement of the structural plate away from the contact area; and
producing a vibration local to the contact area and sufficient to overcome the stiction force. - View Dependent Claims (2)
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3. An electo-mechanical system capable of overcoming stiction forces through localized vibration, the system comprising:
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a base layer having a surface;
a device supported above the surface by a pivot, wherein the device is movable along a movement path;
a stop located at a contact position along the movement path, wherein the device contacts the stop at the contact position, and wherein a stiction force between the device and the stop exits at the contact postion; and
a vibration element operable to cause a vibration at or near the contact position, wherein the vibration disrupts the stiction force. - View Dependent Claims (4, 5, 6, 7, 8, 9, 10)
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11. A method for overcoming stiction in an electromechanical system, the method comprising:
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providing a base layer;
providing a device supported above a surface of the base layer by a pivot;
providing an actuator disposed on the base layer;
activating the actuator to cause the device to deflect until an end of the device contacts the base layer or a structure disposed thereon at a contact position, wherein further movement of the device is retarded by a stiction force at the contact position;
deactivating the actuator to allow the device to return to a static position; and
vibrating an area at or about the contact position, wherein the vibration disrupts the stiction force. - View Dependent Claims (12, 13, 14, 15, 16, 17)
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18. A method for overcoming stiction through vibrations localized to areas susceptible to stiction forces, the method comprising:
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providing a base layer;
providing at least a first and a second device;
wherein the first device is moveable to contact the base layer or a first structure thereon at a first contact position, and wherein at the first contact position, movement of the first device is susceptible to stiction forces; and
wherein the second device is moveable to contact the base layer or a second structure thereon at a second contact position, and wherein at the second contact position, movement of the second device is susceptible to stiction forces; and
concurrently vibrating an area at or about the first and the second contact positions, wherein the vibration disrupts the stiction forces. - View Dependent Claims (19, 20, 21, 22, 23, 24)
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25. An electromechanical system, the system comprising:
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a structural plate in contact with a stop; and
an actuator activated by a force for creating a movement of the stop relative to the structural plate, wherein the movement is sufficient to overcome stiction forces between the structural plate and the stop. - View Dependent Claims (26, 27, 28, 29, 30, 31)
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32. A method of providing localized vibration in an electromechanical system, the method comprising:
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providing a base layer;
providing a stop disposed over the base layer;
providing a structural plate supported over the base layer by a pivot, wherein the structural plate is moveable to contact the stop;
providing an actuator disposed relative to the stop;
applying a static force to the actuator, wherein the stop displaces from a static position to a displaced position; and
removing the static force from the actuator to cause a movement of the stop relative to the structural plate, wherein the movement is sufficient to overcome stiction forces between the stop and the structural plate. - View Dependent Claims (33, 34, 35, 36, 37, 38, 39, 40)
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41. An electromechanical system, the system comprising:
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a mechanical stop;
a structural plate disposed relative to the mechanical stop, wherein a side of the structural plate contacts the mechanical stop; and
an actuator, wherein application of a DC voltage to the actuator causes the mechanical stop to move relative to the structural plate from a static position to a displaced position, and wherein removal of the static force causes a movement of the mechanical stop from the displaced position to the static position, and wherein the movement is sufficient to overcome stiction forces between the structural plate and the mechanical stop. - View Dependent Claims (42, 43, 44, 45)
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46. An optical routing apparatus comprising a moveable micro-mirror, the optical routing apparatus comprising:
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a base layer;
a stop disposed over the base layer;
a structural plate supported above the substrate by a pivot, wherein the structural plate is deflectable to contact the stop;
an actuator disposed near the stop, wherein application of a DC voltage to the actuator causes the stop to displace from a static position, and wherein removing the DC voltage allows the stop to displace to the static position, and wherein displacement to the static position creates a movement sufficient to overcome stiction related forces between the stop and the structural plate. - View Dependent Claims (47, 48, 49)
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50. An electromechanical system, the system comprising:
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a structural plate in contact with a stop; and
an actuator activated by an alternating force for creating an oscillating movement of the stop relative to the structural plate, wherein the oscillating movement is sufficient to overcome stiction forces between the structural plate and the stop. - View Dependent Claims (51, 52, 53, 54, 55, 56)
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57. A method of providing localized vibration in an electromechanical system, the method comprising:
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providing a base layer;
providing a stop disposed over the base layer;
providing a structural plate supported over the base layer by a pivot, wherein the structural plate is moveable to contact the stop;
providing an actuator disposed relative to the stop;
applying an alternating force to the actuator to create a movement of the stop, wherein the stop displaces from a static position to a displaced position when the alternating force is at a first potential and returns toward the static position when the alternating force is at a second potential; and
wherein the movement is sufficient to overcome stiction forces between the stop and the structural plate. - View Dependent Claims (58, 59, 60, 61, 62)
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63. An electromechanical system, the system comprising:
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a mechanical stop;
a structural plate disposed relative to the mechanical stop, wherein a side of the structural plate contacts the mechanical stop; and
an actuator, wherein application of an AC voltage to the actuator causes the mechanical stop to vibrate, and wherein the vibration is sufficient to overcome stiction forces between the structural plate and the mechanical stop. - View Dependent Claims (64)
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65. An optical routing apparatus comprising a moveable micro-mirror, the optical routing apparatus comprising:
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a base layer;
a stop disposed over the base layer;
a structural plate supported above the base layer by a pivot, wherein the structural plate is deflectable to contact the stop; and
an actuator disposed near the stop, wherein application of an AC voltage to the actuator causes the stop to oscillate at a frequency at or about the frequency of the AC voltage, and wherein the oscillation is sufficient to overcome stiction related forces between the stop and the structural plate. - View Dependent Claims (66, 67)
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68. An electromechanical system, the system comprising:
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a base layer;
a stop disposed on the base layer;
a structural plate supported above the base layer by a pivot, wherein the structural plate can deflect to contact the stop; and
a contact for receiving a driving force, wherein a frequency of the driving force is at or near the resonant frequency, or a harmonic thereof, of either the stop or the structural plate, and wherein receiving the driving force causes a vibration of the stop relative to the structural plate. - View Dependent Claims (69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81, 82)
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83. A method of providing localized vibration in an electromechanical system, the method comprising:
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providing a base layer;
providing a stop disposed over the base layer;
providing a structural plate supported over the base layer by a pivot, wherein the structural plate is moveable to contact the stop;
applying a driving force to the stop, wherein a frequency of the driving force is at or near the resonant frequency, or a harmonic thereof, of either the stop or the structural plate, and wherein the driving force causes a vibration of the stop relative to the structural plate; and
wherein the movement is sufficient to overcome stiction forces between the stop and the structural plate. - View Dependent Claims (84, 85, 86, 87, 88, 89)
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90. An electromechanical system, the system comprising:
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a base layer;
a structural plate supported above the base layer by a pivot, wherein a first portion of the structural plate contacts the base layer or a stop disposed on the base layer, and a second portion of the structural plate contacts the pivot, and wherein a structure is disposed between the first and the second portions;
a driving force, wherein the driving force has a frequency at or near the natural frequency, or a harmonic thereof, of the structure; and
wherein the driving force causes a vibration of the structural plate relative to the base layer, the vibration sufficient to overcome stiction related forces between the base layer and the structural plate. - View Dependent Claims (91)
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Specification