Enhanced preventative maintenance system and method of use
First Claim
1. An enhanced system for use in generating a PM (preventative maintenance) schedule for an automated equipment facility comprising:
- at least one piece of automated equipment, wherein the at least one piece of automated equipment has a plurality of associated parts;
a tool performance tracking system (“
TP2”
) in operative communication with the at least one piece of automated equipment to monitor and to analyze data retrieved from the at least one piece of automated equipment;
a PM task database for storing a plurality of PM defined tasks; and
a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule for performing PM on the plurality of associated parts.
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Accused Products
Abstract
The invention provides an enhanced system and method for dynamically generating an accurate preventative maintenance (“PM”) schedule for use in an automated facility. The system has a at least one piece of automated equipment, wherein the at least one piece of automated equipment has a plurality of associated parts; a tool performance tracking system (“TP2”) in operative communication with the at least one piece of automated equipment to monitor and to analyze data retrieved from the at least one piece of automated equipment; a PM task database for storing a plurality of PM defined tasks; and a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule for performing PM on the plurality of associated parts.
11 Citations
20 Claims
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1. An enhanced system for use in generating a PM (preventative maintenance) schedule for an automated equipment facility comprising:
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at least one piece of automated equipment, wherein the at least one piece of automated equipment has a plurality of associated parts;
a tool performance tracking system (“
TP2”
) in operative communication with the at least one piece of automated equipment to monitor and to analyze data retrieved from the at least one piece of automated equipment;
a PM task database for storing a plurality of PM defined tasks; and
a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule for performing PM on the plurality of associated parts. - View Dependent Claims (2, 3)
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4. A PM method for generating a PM schedule for an automated equipment facility comprising the steps of:
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providing at least one piece of automated equipment, wherein the at least one piece of automated equipment has a plurality of associated parts;
providing a tool performance tracking system (“
TP2”
) in operative communication with the at least one piece of automated equipment to monitor and to analyze data retrieved from the at least one piece of automated equipment;
providing a PM task database for storing a plurality of PM defined tasks; and
providing a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule for performing PM on the plurality of associated parts. - View Dependent Claims (5, 6, 7, 8, 9, 10, 11, 12)
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13. A PM method for generating a PM schedule for an automated wafer fabrication facility comprising the steps of:
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providing a plurality of wafer fabrication equipment, wherein each of the plurality of wafer fabrication equipment has a plurality of associated parts;
providing a tool performance tracking system (“
TP2”
) in operative communication with the plurality of wafer fabrication equipment to monitor and to analyze data retrieved from the plurality of wafer fabrication equipment;
providing a PM task database for storing a plurality of PM defined tasks; and
providing a PM system, the PM system in operative communication with the TP2 and in further operative communication with the PM task database, wherein the PM system generates a PM schedule for performing PM on the plurality of associated parts. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification