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Thermal bubble type micro inertial sensor

  • US 20040103720A1
  • Filed: 11/24/2003
  • Published: 06/03/2004
  • Est. Priority Date: 11/29/2002
  • Status: Active Grant
First Claim
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1. A thermal bubble type micro inertial sensor, comprising:

  • a substrate;

    a heater arranged on the substrate;

    at least two temperature sensing members symmetrical arranged at opposite sides of the heater and on the substrate, respectively, to sense a temperature difference beside the heater;

    a cap arranged above the substrate to cover and encapsulate the heater and the at least two temperature sensing members; and

    a liquid filled into a chamber formed between the cap and the substrate.

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