Laser scanning method and system for marking articles such as printed circuit boards, integrated circuits and the like

• US 20040104202A1
• Filed: 07/11/2003
• Published: 06/03/2004
• Est. Priority Date: 01/28/2000
• Status: Abandoned Application

• Current Assignee: Electro Scientific Industries Incorporated (MKS Instruments Incorporated)
• Original Assignee: GSI Lumonics, Inc.
• Inventors: Kane, J. Miles, Downes, Joseph P., Hunt, Frank B. Jr., Svetkoff, Donald J., Schramm, Rainer
• Application Number:
  US10/617,940
• Publication Number:
  US 20040104202A1
• Time in Patent Office: Days
• US Class Current: 219/121.8
• CPC Class Codes: B23K 2101/42 Printed circuits
• CPC Class Codes: B23K 26/032 using optical means
• CPC Class Codes: B23K 26/0838 by using an endless conveyor belt
• CPC Class Codes: B41J 2/47 using the combination of scanning and modulation of light
• CPC Class Codes: H01L 23/544 Marks applied to semiconductor devices or parts, e.g. registration marks, alignment structures, wafer maps test patterns for characterising or monitoring manufacturing processes H01L22/00
• CPC Class Codes: H01L 2924/00 Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
• CPC Class Codes: H01L 2924/0002 Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
• CPC Class Codes: H05K 1/0266 Marks, test patterns or identification means
• CPC Class Codes: H05K 1/0269 for visual or optical inspection
• CPC Class Codes: H05K 2203/107 Using laser light
• CPC Class Codes: H05K 2203/1545 Continuous processing, i.e. involving rolls moving a band-like or solid carrier along a continuous production path
• CPC Class Codes: H05K 3/0008 for aligning or positioning of tools relative to the circuit board H05K3/4638, H05K3/4679 take precedence; for manufacturing assemblages of components H05K13/0015
• CPC Class Codes: H05K 3/0097 Processing two or more printed circuits simultaneously, e.g. made from a common substrate, or temporarily stacked circuit boards H05K3/0052 takes precedence

Abstract

A laser scanning method and system for marking articles is provided wherein control is provided by a single central controller. The system includes a conveyor for conveying the articles in a first direction at a marking station. A conveyor controller controls the conveyor in response to conveyor control signals. A laser and an optical subsystem are optically coupled to the laser for generating a focused laser beam in response to laser control signals. A scan head includes a laser beam deflector for steering the focused laser beam along two substantially orthogonal intersecting axes at the marking station to mark a first predetermined region on at least one of the articles in response to deflection control signals. An actuator is coupled to at least part of the scan head for displacing the axes in a second direction substantially orthogonal to the first direction at the marking station in response to displacement control signals wherein the laser beam deflector steers the focused laser beam along the displaced axes to mark a second predetermined region on the at least one article. A central controller is provided for generating the deflection control signals, the laser control signals, the displacement control signals and the conveyor control signals in response to input data representing marking locations and marking content.

Claims

1. A laser scanning method for marking articles, the method comprising:

a) controllably conveying the articles in a first direction at a marking station;

b) generating a focused laser beam;

c) controllably steering the focused laser beam along two substantially orthogonal intersecting axes at the marking station to mark a first predetermined region on at least one of the articles based on input data representing marking locations and marking content;

d) displacing the axes in a second direction substantially orthogonal to the first direction at the marking station; and

e) controllably steering the focused laser beam along the displaced axes to mark a second predetermined region on the at least one article based on the input data.

2. The method as claimed in claim 1 further comprising the steps of sensing at least one portion of the at least one article at the marking station and providing a corresponding signal representative of an image of the at least one portion and offsetting at least one of the axes prior to step c) based on the signal.

3. The method as claimed in claim 1 wherein the articles are substantially stationary during step c).

4. The method as claimed in claim 1 wherein the articles are controllably conveyed during step c).

5. The method as claimed in claim 2 wherein the step of sensing includes the step of scanning a region of the at least one article containing a known feature of the at least one article and providing a corresponding image signal and offsetting at least one of the axes prior to step c) based on the image signal.

6. The method as claimed in claim 1 wherein the articles are printed circuit boards.

7. The method as claimed in claim 1 wherein the articles are integrated circuits.

8. The method as claimed in claim 1 wherein the articles are semiconductor packages.

9. The method as claimed in claim 1 wherein a marking pattern including a plurality of spots, each having a size of about 25-50 microns, is marked on each of the articles.

10. A laser scanning system for marking articles, the system comprising:

a conveyor for conveying the articles in a first direction at a marking station;

a conveyor controller for controlling the conveyor in response to conveyor control signals;

a laser and an optical subsystem optically coupled to the laser for generating a focused laser beam in response to laser control signals;

a scan head including a laser beam deflector for steering the focused laser beam along two substantially orthogonal intersecting axes at the marking station to mark a first predetermined region on at least one of the articles in response to deflection control signals;

an actuator coupled to at least part of the scan head for displacing the axes in a second direction substantially orthogonal to the first direction at the marking station in response to displacement control signals wherein the laser beam deflector steers the focused laser beam along the displaced axes to mark a second predetermined region on the at least one article; and

a central controller for generating the deflection control signals, the laser control signals, the displacement control signals and the conveyor control signals in response to input data representing marking locations and marking content.

11. The system as claimed in claim 10 further comprising a machine vision subsystem for sensing at least one portion of the at least one article at the marking station and providing a corresponding image signal representative of an image of the at least one portion, the central controller generating an offset signal in response to the image signal for offsetting at least one of the axes.

12. The system as claimed in claim 11 wherein the machine vision subsystem includes a lighting assembly for illuminating the articles at the marking station.

13. The system as claimed in claim 12 wherein the lighting assembly includes a pulsed illumination subsystem.

14. The system as claimed in claim 10 wherein the laser beam deflector includes a two dimensional, addressable galvanometer.

15. The system as claimed in claim 10 further comprising a second laser for generating a scanning laser beam, the laser beam deflector steering the scanning laser beam along the axes to scan a region of the at least one article containing a known feature of the at least one article and providing a corresponding image signal, the central controller generating an offset signal in response to the image signal for offsetting at least one of the axes.

16. The system as claimed in claim 10 wherein the articles are printed circuit boards.

17. The system as claimed in claim 10 wherein the articles are integrated circuits.

18. The system as claimed in claim 10 wherein the articles are semiconductor packages.

19. The system as claimed in claim 10 wherein a marking pattern including a plurality of spots, each having a size of about 25-50 microns, is marked on each of the articles.

20. The system as claimed in claim 10 wherein the conveyor is capable of being controllably positioned by the conveyor controller with a positioning accuracy of about 5 mils.