Plasma immersion ion implantation apparatus including a plasma source having low dissociation and low minimum plasma voltage
First Claim
1. A plasma immersion ion implantation reactor for ion implanting a species into a surface layer of a workpiece, comprising:
- an enclosure comprising a side wall and a ceiling and defining a chamber;
a workpiece support pedestal within the chamber having a workpiece support surface facing said ceiling and defining a process region extending generally across said wafer support pedestal and confined laterally by said side wall and axially between said workpiece support pedestal and said ceiling;
said enclosure having at least a first pair of openings at generally opposite sides of said process region;
a first hollow conduit outside of said chamber having first and second ends connected to respective ones of said first pair of openings, so as to provide a first reentrant path extending through said conduit and across said process region;
gas distribution apparatus on or near an interior surface of said reactor for introducing a process gas containing the species to be ion implanted;
a first RF plasma source power applicator for generating a plasma in said chamber.
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Accused Products
Abstract
A method for ion planting a species into a surface layer of a workpiece in a chamber, the method includes placing the workpiece in a processing zone of the chamber bounded by a chamber side wall and a chamber ceiling facing said workpiece and between a pair of ports of the chamber near generally opposite sides to the processing zone and connected together by a conduit external of the chamber. The method further includes introducing into the chamber a process gas comprising the species to be implanted, and further generating from the process gas a plasma current and causing the plasma current to oscillate in a circulatory reentrant path comprising the conduit and the processing zone.
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Citations
81 Claims
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1. A plasma immersion ion implantation reactor for ion implanting a species into a surface layer of a workpiece, comprising:
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an enclosure comprising a side wall and a ceiling and defining a chamber;
a workpiece support pedestal within the chamber having a workpiece support surface facing said ceiling and defining a process region extending generally across said wafer support pedestal and confined laterally by said side wall and axially between said workpiece support pedestal and said ceiling;
said enclosure having at least a first pair of openings at generally opposite sides of said process region;
a first hollow conduit outside of said chamber having first and second ends connected to respective ones of said first pair of openings, so as to provide a first reentrant path extending through said conduit and across said process region;
gas distribution apparatus on or near an interior surface of said reactor for introducing a process gas containing the species to be ion implanted;
a first RF plasma source power applicator for generating a plasma in said chamber. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38, 39, 40, 41, 42, 43, 44, 45, 46, 47, 48, 49, 50, 51, 52, 53, 54, 55, 56, 57, 58, 59, 60, 61, 62, 63, 64, 65, 66, 67, 68, 69, 70, 71, 72, 73, 74, 75, 76, 77, 78, 79, 80, 81)
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Specification