Optical circuit in which fabrication is easy
First Claim
Patent Images
1. A mirror comprising a multi-layer thin film, wherein said multi-layer thin film comprises a first layer and a second layer, said first layer has a reflection surface plane, said second layer has a contact plane with a substrate, and an angle between said reflection surface plane and said contact plane is 45°
- or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal.
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Abstract
In a method for fabricating an optical circuit, a mirror element with a protection film formed within a die of a semiconductor is connected to a substrate at a predetermined position. The mirror element with the protection film connected to the substrate is peeled from the die of the semiconductor. The protection film is removed to expose a reflection surface of a reflection film of the mirror element.
29 Citations
40 Claims
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1. A mirror comprising a multi-layer thin film, wherein said multi-layer thin film comprises a first layer and a second layer,
said first layer has a reflection surface plane, said second layer has a contact plane with a substrate, and an angle between said reflection surface plane and said contact plane is 45° - or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal.
- View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A mirror comprising a gold layer, wherein said gold layer has a reflection surface plane and a contact plane, an angle between said reflection surface plane and said contact plane is 45°
- or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal.
- View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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19. An optical circuit comprising:
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a substrate;
an optical fiber or an optical waveguide provided for said substrate;
a photodiode or a surface emission type laser provided for said substrate; and
a mirror connected with said substrate, wherein said mirror comprises a multi-layer thin film, which comprises a first layer and a second layer, said first layer is a reflection surface plane, said second layer has a contact plane with a substrate, an angle between said reflection surface plane and said contact plane is 45°
or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29)
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30. An optical circuit comprising:
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a substrate;
an optical fiber or an optical waveguide provided for said substrate;
a photodiode or a surface emission type laser provided for said substrate; and
a mirror jointed with said substrate, wherein said mirror comprises a gold layer, which comprises a reflection surface plane and a contact plane, an angle between said reflection surface plane and said contact plane is 45°
or equal to an angle between (100) plane orientation and a (111) plane orientation in a silicon crystal. - View Dependent Claims (31, 32, 33, 34, 35, 36, 37, 38, 39, 40)
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Specification
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Current AssigneeNEC Corporation
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Original AssigneeNEC Corporation
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InventorsSoejima, Koji, Oda, Mikio, Kitajo, Sakae
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Granted Patent
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Time in Patent OfficeDays
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Field of Search
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US Class Current257/734
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CPC Class CodesG02B 2006/12104 Mirror; Reflectors or the likeG02B 6/122 Basic optical elements, e.g...G02B 6/4214 the intermediate optical el...G02B 6/4224 using visual alignment mark...
