Low-voltage electromechanical device including a tiltable microplatform, method of tilting same, array of such devices and method of setting dimple-to-substrate spacing

• US 20040109222A1
• Filed: 04/29/2003
• Published: 06/10/2004
• Est. Priority Date: 04/30/2002
• Status: Active Grant

• Current Assignee: Board of Regents of the University of Michigan (University of Michigan)
• Original Assignee: Board of Regents of the University of Michigan (University of Michigan)
• Inventors: Nguyen, Clark T.-C., Xie, Yuan
• Granted Patent: US 6,954,301 B2
• Time in Patent Office: Days
• US Class Current: 359/290
• CPC Class Codes: B81B 2201/045 Optical switches
• CPC Class Codes: B81B 3/004 Angular deflection
• CPC Class Codes: G02B 7/003 Alignment of optical elements G02B7/001, G02B7/002 take precedence; for mirrors G02B7/1822
• CPC Class Codes: G02B 7/1827 Motorised alignment

Abstract

A low-voltage electromechanical device including a tiltable microplatform, method of tilting same and array of such devices are provided. The tiltable or steerable microplatform utilizes a bent-beam actuator to achieve large tilting angles with low actuation voltages. Thin beams of the actuator are bent in such a way as to cause the microplatform to pivot around a dimple support that generates a torsional force leading to angular motion in suspension beams attached perpendicular to the thin beams and, in turn, leading to angular or tilting motion in the suspended microplatform. Some of the key features include (1) the low-voltage bent-beam actuator; (2) a dimple-supported microplatform with a hole underneath in the substrate to allow light to pass through and to allow unhindered tilting of the microplatform; and (3) a method for constructing a microprism on the tiltable transparent microplatform for color dispersion purposes in an adaptive vision system.

Claims

1. A low-voltage electromechanical device comprising:

a substrate having an aperture;

a microplatform;

a pivotable support structure coupled to the microplatform to suspend the microplatform over the aperture and to tilt the microplatform; and

a microactuator anchored on the substrate to pivot the support structure in response to an electrical signal to thereby tilt the microplatform over the aperture.

2. The device as claimed in claim 1, wherein the rotatable support structure includes a pair of pivotable suspension beams coupled on opposite sides of the microplatform to tilt the microplatform.

3. The device as claimed in claim 2, further comprising at least one pivot extending between each of the suspension beams and the substrate to pivotably support the suspension beams.

4. The device as claimed in claim 3, wherein each of the suspension beams has upper and lower surfaces and wherein the pivots are formed on the lower surfaces of the suspension beams and wherein the suspension beams rest on the substrate by means of the pivots.

5. The device as claimed in claim 1, wherein the microactuator includes a pair of bendable actuation beams and a drive electrode formed on the substrate to allow electrostatic excitation of the actuation beams to bend the actuation beams to thereby pivot the support structure.

6. The device as claimed in claim 5, further comprising an insulation layer formed on the drive electrode to prevent the actuation beams from shorting the drive electrode during electrostatic pull down of the actuation beams.

7. The device as claimed in claim 1, further comprising a spring support wherein the microactuator is anchored to the substrate by the spring support.

8. The device as claimed in claim 6, further comprising a spring support coupled to the actuation beams to facilitate pull down of the actuation beams during electrostatic excitation.

9. The device as claimed in claim 1, further comprising an optical element formed on the microplatform.

10. The device as claimed in claim 9, wherein the optical element is a layer having a reflective surface.

11. The device as claimed in claim 9, wherein the optical element is a microprism to divide light into its color components.

12. The device as claimed in claim 11, wherein the aperture extends completely through the substrate to provide an optical path through the substrate and wherein the microplatform is transparent.

13. The device as claimed in claim 1 wherein the microplatform is a low-stress nitride microplatform.

14. The device as claimed in claim 2 wherein the suspension beams are rigid polysilicon suspension beams.

15. The device as claimed in claim 1 wherein the substrate is a silicon wafer.

16. The device as claimed in claim 5 wherein the actuation beams are doped-polysilicon actuation beams which extend substantially perpendicular to the support structure.

17. The device as claimed in claim 3 wherein the microactuator includes a pair of bendable actuation beams substantially perpendicularly attached to the suspension beams adjacent the pivots.

18. The device as claimed in claim 1 wherein amount of microplatform rotation is based on strength of the electrical signal.

19. The device as claimed in claim 5 wherein amount of an actuation beam pinned to the drive electrode during electrostatic excitation is based on strength of the electrical signal.

20. The device of claim 5 wherein the actuation beams follow a substantially parabolic path during bending thereof.

21. The device of claim 9 wherein the optical element is a lens.

22. The device as claimed in claim 9 further comprising means for directing a collimated beam of light toward the optical element.

23. The device as claimed in claim 12 further comprising a detector for detecting the color components.

24. A method for tilting a microplatform suspended over an aperture formed in a substrate by a pivotable support structure coupled to the microplatform, the method comprising:

providing a pair of bendable actuation beams on the substrate; and

forcing the actuation beams to bend so that the actuation beams pivot the support structure to thereby tilt the microplatform over the aperture.

25. The method as claimed in claim 24 further comprising:

providing a drive electrode to allow electrostatic excitation of the actuation beams and wherein the step of forcing includes the step of applying an electrical signal to the drive electrode to bend the actuation beams.

26. An array of low-voltage electromechanical devices, the array comprising:

a substrate having a plurality of apertures;

a plurality of microplatforms;

a pivotable support structure coupled to each of the microplatforms to suspend the microplatforms over their respective apertures and to tilt the microplatforms; and

a plurality of microactuators anchored to the substrate to pivot the support structures in response to at least one electrical signal to thereby tilt the microplatforms over their respective apertures.

27. The array as claimed in claim 26 further comprising an optical element formed on each of the microplatforms.

28. The array as claimed in claim 27 further comprising a collimating lens array for directing collimated beams of light toward the optical elements.

29. The array as claimed in claim 28 wherein the optical elements are microprisms to divide the collimated beams of light into their color components.

30. The array as claimed in claim 29 wherein the apertures extend completely through the substrate to provide optical paths through the substrate and wherein each of the microplatforms is transparent.

31. The array as claimed in claim 30 further comprising a detector array for detecting the color components of the collimated beams of light.

32. A method of setting a dimple-to-substrate spacing between dimples and a substrate, the method comprising:

forming a first oxide layer on a substrate;

forming vias into the first oxide layer corresponding to dimple locations; and

forming a second oxide layer on the first oxide layer after the step of forming the vias to set the dimple-to-substrate spacing.