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Manufacturing process of a magnetic head, magnetic head, pattern formation method

  • US 20040109263A1
  • Filed: 03/27/2003
  • Published: 06/10/2004
  • Est. Priority Date: 03/29/2002
  • Status: Active Grant
First Claim
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1. A manufacturing method of a magnetic head, comprising:

  • a step for forming a lift-off mask pattern on a magnetoresistance effect element such that an upper part of the lift-off mask pattern is formed greater than a lower part of the lift-off mask pattern, a step for forming a pair of electrodes on the magnetoresistance effect element using the liftoff mask pattern as a mask, and a step for removing the lift-off mask pattern;

    wherein said step for forming the lift-off mask pattern is performed according to a dry etching process.

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