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Polymer solution for nanoimprint lithography to reduce imprint temperature and pressure

  • US 20040110856A1
  • Filed: 12/04/2002
  • Published: 06/10/2004
  • Est. Priority Date: 12/04/2002
  • Status: Active Grant
First Claim
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1. An imprintable polymer solution for imprinting, said polymer solution comprising at least one polymer dissolved in at least one polymerizable monomer.

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