Measuring pressure exerted by a rigid surface
First Claim
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1. A pressure sensor apparatus, comprising:
- a substrate;
a pressure sensor secured to the substrate; and
a planar elastomeric layer covering the pressure sensor to spread an applied force over an area at least as large as the pressure sensor.
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Abstract
A means to accurately measure the pressure distribution across a rigid or semi-rigid surface, or between two rigid or semi-rigid surfaces with high special resolution is disclosed. The present invention relates to measuring a pressure distribution. The present invention would be ideal for use in various types of manufacturing tooling and various in situ industrial machine controls. The present invention uses an array of commercial micro-machined silicon pressure sensing die attached to a substrate and encapsulated in an elastomer.
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Citations
10 Claims
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1. A pressure sensor apparatus, comprising:
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a substrate;
a pressure sensor secured to the substrate; and
a planar elastomeric layer covering the pressure sensor to spread an applied force over an area at least as large as the pressure sensor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification