Fluoride in supercritical fluid for photoresist and residue removal

• US 20040112409A1
• Filed: 12/16/2002
• Published: 06/17/2004
• Est. Priority Date: 12/16/2002
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Supercritical Systems, Inc. (Tokyo Electron Limited)
• Inventors: Schilling, Paul E.
• Application Number:
  US10/321,341
• Publication Number:
  US 20040112409A1
• Time in Patent Office: Days
• US Class Current: 134/26
• CPC Class Codes: B08B 7/0021 by liquid gases or supercritical fluids
• CPC Class Codes: H01L 21/67028 for cleaning followed by drying, rinsing, stripping, blasting or the like

Abstract

A method and system for removing a residue from a substrate material is disclosed. The method and system utilize a supercritical cleaning solution with an fluoride source to control the concentration of fluoride ions and/or hydrogen fluoride within the supercritical cleaning solution. Preferably, the method and the system utilize a supercritical cleaning solution with supercritical CO₂ and an ammonium fluoride salt and/or an organo-ammonium fluoride and/or amine adduct. The supercritical cleaning solution, in accordance with further embodiments, includes one or more acids and one or more carrier solvents. The supercritical cleaning solution of the present invention is capable of removing a residue, such a post-etch photo polymer residue from a semiconductor substrate material by dissolution of the reside, etching a portion of the residue, etching a portion of the substrate material or any combination thereof.

Claims

22. A system for cleaning a substrate, the system comprising a chamber for generating a supercritical solution comprising:

a. supercritical CO₂;

b. an amine comprising at least one organo group; and

c. hydrogen fluoride, wherein the at least a portion of the hydrogen fluoride and the amine form an ammonium fluoride adduct.

23. The system of claim 22, wherein the supercritical solution is substantially free of water.

24. The system of claim 22, wherein the amine is selected from the group consisting of a secondary ammine, a tertiary amine, a pyridine, a pyrrole and a pyrrolidone.

25. The system of claim 22, wherein the supercritical solution further comprises one or more organic carrier solvents.

26. The method of claim 22, wherein the supercritical solution further comprises one or more organic acids.

27. The system of claim 22, wherein the system is configured to clean silicon wafers.

28. A method of cleaning a substrate comprising:

a. generating a supercritical cleaning solution in the presence of the substrate, the supercritical solution comprising supercritical CO₂ and fluoride source;

b. circulating the supercritical cleaning solution; and

c. removing the supercritical cleaning solution.

1. A method comprising:

a. maintaining a substrate structure comprising a substrate material and residue thereon within a supercritical cleaning solution, the supercritical cleaning solution comprising supercritical CO₂ and a fluoride source, whereby the fluoride source facilitates dissolution of the residue from the substrate material; and

b. removing the supercritical solution and the residue away from the substrate material.

2. The method of claim 1, wherein the fluoride source comprises a organo-ammonium fluoride.

3. The method of claim 2, where the organo-ammonium fluoride comprises a cyclic organo-ammonium fluoride.

4. The method of claim 2, wherein the organo-ammonium fluoride comprises a pyrrolidone structure.

5. The method of claim 3, wherein the cyclic organo-ammonium fluoride is unsaturated.

6. The method of claim 5, wherein the cyclic organo-ammonium fluoride comprises a pyridine structure.

7. The method of claim 6, wherein the pyridine structure is a benzo-pyridine structure.

8. The method of claim 2, wherein the organo ammonium fluoride is a quaternary organo ammonium fluoride having a chemical formula [R₁R₂R₃R₄N]⁺[F]⁻

.

9. The method of claim 8, wherein one or more of R₁, R₂, R₃, and R₄ comprises a group selected from an alkyl and an aromatic group.

10. The method of claim 2, wherein the organo-ammonium fluoride is a tertiary ammonium fluoride having a chemical formula [R₁R₂R₃HN]⁺[F]⁻

.

11. The method of claim 10, wherein one or more of the R₁, R₂ and R₃ comprises a group selected from a butyl, methyl, ethyl, alkyl, fluoro-alkyl, branched alkyl, an unsaturated alkyl, alkyl halide and an aromatic group.

12. The method of claim 1, wherein the supercritical cleaning solution further comprises an organic acid.

13. The method of claim 12, wherein the organic acid is an organic acid selected from the group consisting of formic acid, acetic acid, chloroacetic acid, trifluoroacedic acid and trichloroacidic acid.

14. The method of claim 1, wherein the supercritical cleaning solution further comprises a carrier solvent.

15. The method of claim 14, wherein the carrier solvent is selected from the group consisting of as N,N-dimethylacetamide (DMAC), gamma-butyrolacetone (BLO), dimethyl sulfoxide (DMSO), ethylene carbonate (EC) N-methylpyrrolidone (NMP), dimethylpiperidone, propylene carbonate and alcohol.

16. The method of claim 1, wherein the residue comprises a polymer.

17. The method of claim 16, wherein the polymer is a photoresist polymer.

18. The method of claim 1, wherein the substrate material comprises a silicon dioxide.

19. The method of claim 1, further comprising washing the substrate material with a supercritical rinsing solution after removing the supercritical cleaning solution and the residue away from the substrate material.

20. The method of claim 19, wherein the supercritical rinsing solution comprises CO₂ and an organic solvent.

21. The method of claim 20, wherein the organic solvent is selected from the group consisting of as N,N-dimethylacetamide (DMAC), gamma-butyrolacetone (BLO), dimethyl sulfoxide (DMSO), ethylene carbonate (EC) N-methylpyrrolidone (NMP), dimethylpiperidone, propylene carbonate and alcohol.

29. The method of claim 28, wherein generating the supercritical cleaning solution comprises adding an amine and a carrier solution to a chamber.

30. The method of claim 29, wherein the carrier solution comprises one or more organic solvents and one or more organic acids.

31. The method of claim 28, wherein removing the supercritical cleaning solution comprises flushing the chamber with supercritical CO₂.

32. The method of claim 28, further comprising adding a rinse solution, after removing the supercritical cleaning solution, the rinse solution comprising supercritical CO₂ and one or more organic solvents.

32-1. The method of claim 28, wherein the cleaning solution is substantially anhydrous.